Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Oili M.E. Ylivaara, Pasi Hyttinen, Karsten Arts, Feng Gao, Wilhelmus M.M. Erwin Kessels, Riikka, L. Puurunen, Mikko Utriainen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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Physics & Astronomy