Advanced silicon etch evaluation

A. Rickard, M. McNie, C. Pickering, I. Young, J. Hopkins, H. Ashraf, S. McAuley, F. Roozeboom, C. Gormley, P. Schina, Jyrki Kiihamäki

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2003
MoE publication typeNot Eligible
EventIoP Conference on Dry Etching - Advances and Trends - London, United Kingdom
Duration: 22 Jan 200322 Jan 2003

Conference

ConferenceIoP Conference on Dry Etching - Advances and Trends
CountryUnited Kingdom
CityLondon
Period22/01/0322/01/03

Cite this

Rickard, A., McNie, M., Pickering, C., Young, I., Hopkins, J., Ashraf, H., McAuley, S., Roozeboom, F., Gormley, C., Schina, P., & Kiihamäki, J. (2003). Advanced silicon etch evaluation. Paper presented at IoP Conference on Dry Etching - Advances and Trends, London, United Kingdom.