Advances in miniature spectrometer and sensor development

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16 Citations (Scopus)

Abstract

Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to open up new applications areas and business opportunities for analytical technology in hand held, mobile and on-line applications. Advances in microfabrication have resulted in high-performance MEMS and MOEMS devices for spectrometer applications. Many other enabling technologies are useful for miniature analytical solutions, such as silicon photonics, nanoimprint lithography (NIL), system-on-chip, system-on-package techniques for integration of electronics and photonics, 3D printing, powerful embedded computing platforms, networked solutions as well as advances in chemometrics modeling. This paper will summarize recent work on spectrometer and sensor miniaturization at VTT Technical Research Centre of Finland. Fabry-Perot interferometer (FPI) tunable filter technology has been developed in two technical versions: Piezoactuated FPIs have been applied in miniature hyperspectral imaging needs in light weight UAV and nanosatellite applications, chemical imaging as well as medical applications. Microfabricated MOEMS FPIs have been developed as cost-effective sensor platforms for visible, NIR and IR applications. Further examples of sensor miniaturization will be discussed, including system-on-package sensor head for mid-IR gas analyzer, roll-to-roll printed Surface Enhanced Raman Scattering (SERS) technology as well as UV imprinted waveguide sensor for formaldehyde detection.
Original languageEnglish
Title of host publicationNext-Generation Spectroscopic Technologies VII
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-1-6284-1038-9
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventNext-Generation Spectroscopic Technologies VII - Baltimore, United States
Duration: 5 May 20145 Jun 2014

Publication series

SeriesProceedings of SPIE
Volume9101
ISSN0277-786X

Conference

ConferenceNext-Generation Spectroscopic Technologies VII
Abbreviated titleSPIE 9101
CountryUnited States
CityBaltimore
Period5/05/145/06/14

Keywords

  • Fabry-Perot interferometers
  • spectometers
  • microopto electromechanical systems
  • nanoimprint lithography
  • 3D printing
  • modelling
  • mid-IR
  • sensors

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  • Cite this

    Malinen, J., Rissanen, A., Saari, H., Karioja, P., Karppinen, M., Aalto, T., & Tukkiniemi, K. (2014). Advances in miniature spectrometer and sensor development. In Next-Generation Spectroscopic Technologies VII [91010C] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9101 https://doi.org/10.1117/12.2053567