Advances in miniature spectrometer and sensor development

Jouko Malinen, Anna Rissanen, Heikki Saari, Pentti Karioja, Mikko Karppinen, Timo Aalto, Kari Tukkiniemi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    29 Citations (Scopus)


    Miniaturization and cost reduction of spectrometer and sensor technologies has great potential to open up new applications areas and business opportunities for analytical technology in hand held, mobile and on-line applications. Advances in microfabrication have resulted in high-performance MEMS and MOEMS devices for spectrometer applications. Many other enabling technologies are useful for miniature analytical solutions, such as silicon photonics, nanoimprint lithography (NIL), system-on-chip, system-on-package techniques for integration of electronics and photonics, 3D printing, powerful embedded computing platforms, networked solutions as well as advances in chemometrics modeling. This paper will summarize recent work on spectrometer and sensor miniaturization at VTT Technical Research Centre of Finland. Fabry-Perot interferometer (FPI) tunable filter technology has been developed in two technical versions: Piezoactuated FPIs have been applied in miniature hyperspectral imaging needs in light weight UAV and nanosatellite applications, chemical imaging as well as medical applications. Microfabricated MOEMS FPIs have been developed as cost-effective sensor platforms for visible, NIR and IR applications. Further examples of sensor miniaturization will be discussed, including system-on-package sensor head for mid-IR gas analyzer, roll-to-roll printed Surface Enhanced Raman Scattering (SERS) technology as well as UV imprinted waveguide sensor for formaldehyde detection.
    Original languageEnglish
    Title of host publicationNext-Generation Spectroscopic Technologies VII
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-1-6284-1038-9
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventNext-Generation Spectroscopic Technologies VII - Baltimore, United States
    Duration: 5 May 20145 Jun 2014

    Publication series

    SeriesProceedings of SPIE


    ConferenceNext-Generation Spectroscopic Technologies VII
    Abbreviated titleSPIE 9101
    Country/TerritoryUnited States


    • Fabry-Perot interferometers
    • spectometers
    • microopto electromechanical systems
    • nanoimprint lithography
    • 3D printing
    • modelling
    • mid-IR
    • sensors


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