Aerosol assisted large area photoresist development method

Petri Ahonen, Esko Kauppinen, Arto Salin, Jorma Jokiniemi

Research output: Contribution to journalOther journal contributionScientificpeer-review

19 Citations (Scopus)
Original languageEnglish
Pages (from-to)485 - 486
Number of pages2
JournalJournal of Aerosol Science
Volume24
Issue numberS1
DOIs
Publication statusPublished - 1993
MoE publication typeA1 Journal article-refereed
Event1993 European Aerosol Conference - Duisburg, Germany
Duration: 4 Oct 19938 Oct 1993

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