Aerosol assisted large area photoresist development method

Petri Ahonen, Esko Kauppinen, Arto Salin, Jorma Jokiniemi

Research output: Contribution to journalOther journal contributionScientificpeer-review

19 Citations (Scopus)
Original languageEnglish
Pages (from-to)485 - 486
Number of pages2
JournalJournal of Aerosol Science
Volume24
Issue numberS1
DOIs
Publication statusPublished - 1993
MoE publication typeA1 Journal article-refereed
Event1993 European Aerosol Conference - Duisburg, Germany
Duration: 4 Oct 19938 Oct 1993

Cite this

Ahonen, Petri ; Kauppinen, Esko ; Salin, Arto ; Jokiniemi, Jorma. / Aerosol assisted large area photoresist development method. In: Journal of Aerosol Science. 1993 ; Vol. 24, No. S1. pp. 485 - 486.
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title = "Aerosol assisted large area photoresist development method",
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year = "1993",
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journal = "Journal of Aerosol Science",
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Ahonen, P, Kauppinen, E, Salin, A & Jokiniemi, J 1993, 'Aerosol assisted large area photoresist development method', Journal of Aerosol Science, vol. 24, no. S1, pp. 485 - 486. https://doi.org/10.1016/0021-8502(93)90335-7

Aerosol assisted large area photoresist development method. / Ahonen, Petri; Kauppinen, Esko; Salin, Arto; Jokiniemi, Jorma.

In: Journal of Aerosol Science, Vol. 24, No. S1, 1993, p. 485 - 486.

Research output: Contribution to journalOther journal contributionScientificpeer-review

TY - JOUR

T1 - Aerosol assisted large area photoresist development method

AU - Ahonen, Petri

AU - Kauppinen, Esko

AU - Salin, Arto

AU - Jokiniemi, Jorma

N1 - Project code: LVI2020

PY - 1993

Y1 - 1993

U2 - 10.1016/0021-8502(93)90335-7

DO - 10.1016/0021-8502(93)90335-7

M3 - Other journal contribution

VL - 24

SP - 485

EP - 486

JO - Journal of Aerosol Science

JF - Journal of Aerosol Science

SN - 0021-8502

IS - S1

ER -