Aerosol assisted large area photoresist development method

Petri Ahonen, Esko Kauppinen, Arto Salin, Jorma Jokiniemi

Research output: Contribution to journal › Other journal contribution › Scientific › peer-review

20 Citations (Scopus)

Original language	English
Pages (from-to)	485 - 486
Number of pages	2
Journal	Journal of Aerosol Science
Volume	24
Issue number	S1
DOIs	https://doi.org/10.1016/0021-8502(93)90335-7
Publication status	Published - 1993
MoE publication type	A1 Journal article-refereed
Event	1993 European Aerosol Conference - Duisburg, Germany Duration: 4 Oct 1993 → 8 Oct 1993

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@article{aa47e9a7d812421c92057466c3a55bcf,

title = "Aerosol assisted large area photoresist development method",

author = "Petri Ahonen and Esko Kauppinen and Arto Salin and Jorma Jokiniemi",

note = "Project code: LVI2020; 1993 European Aerosol Conference ; Conference date: 04-10-1993 Through 08-10-1993",

year = "1993",

doi = "10.1016/0021-8502(93)90335-7",

language = "English",

volume = "24",

pages = "485 -- 486",

journal = "Journal of Aerosol Science",

issn = "0021-8502",

publisher = "Elsevier",

number = "S1",

}

TY - JOUR

T1 - Aerosol assisted large area photoresist development method

AU - Ahonen, Petri

AU - Kauppinen, Esko

AU - Salin, Arto

AU - Jokiniemi, Jorma

N1 - Project code: LVI2020

PY - 1993

Y1 - 1993

U2 - 10.1016/0021-8502(93)90335-7

DO - 10.1016/0021-8502(93)90335-7

M3 - Other journal contribution

SN - 0021-8502

VL - 24

SP - 485

EP - 486

JO - Journal of Aerosol Science

JF - Journal of Aerosol Science

IS - S1

T2 - 1993 European Aerosol Conference

Y2 - 4 October 1993 through 8 October 1993

ER -