AI Machine Vision System for Wafer Defect Detection

Dmitry Morits, Marcelo Rizzo Piton, Timo Laakko

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

14 Downloads (Pure)
Original languageEnglish
Title of host publicationIndustrial Artificial Intelligence Technologies and Applications
EditorsOvidiu Vermesan, Franz Wotawa, Mario Diaz Nava, Björn Debaillie
PublisherRiver Publishers
Pages73-80
ISBN (Electronic)978-87-7022-790-2
ISBN (Print)978-87-7022-791-9
DOIs
Publication statusPublished - Jun 2022
MoE publication typeA3 Part of a book or another research book

Cite this