| Original language | English |
|---|---|
| Title of host publication | Industrial Artificial Intelligence Technologies and Applications |
| Editors | Ovidiu Vermesan, Franz Wotawa, Mario Diaz Nava, Björn Debaillie |
| Publisher | River Publishers |
| Pages | 73-80 |
| ISBN (Electronic) | 978-87-7022-790-2 |
| ISBN (Print) | 978-87-7022-791-9 |
| DOIs | |
| Publication status | Published - Jun 2022 |
| MoE publication type | A3 Part of a book or another research book |
AI Machine Vision System for Wafer Defect Detection
Dmitry Morits, Marcelo Rizzo Piton, Timo Laakko
Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review
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