@inbook{f1ca4d040575427f90a9cc58ac9236bc,
title = "AI Machine Vision System for Wafer Defect Detection",
author = "Dmitry Morits and \{Rizzo Piton\}, Marcelo and Timo Laakko",
year = "2022",
month = jun,
doi = "10.13052/rp-9788770227902",
language = "English",
isbn = "978-87-7022-791-9",
pages = "73--80",
editor = "Ovidiu Vermesan and Franz Wotawa and Nava, \{Mario Diaz\} and Bj{\"o}rn Debaillie",
booktitle = "Industrial Artificial Intelligence Technologies and Applications",
publisher = "River Publishers",
address = "Denmark",
}