Air damping in resonant micromechanical capacitive sensors

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationEurosensors XIV: the 14th European Conference on Solid-State Transducers
Subtitle of host publicationProceedings
PublisherTechnical University of Denmark DTU
Pages221-224
ISBN (Electronic)978-87-899-3550-8
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
Event14th European Conference on Solid-State Transducers, EUROSENSORS XIV - Copenhagen, Denmark
Duration: 27 Aug 200030 Aug 2000

Conference

Conference14th European Conference on Solid-State Transducers, EUROSENSORS XIV
CountryDenmark
CityCopenhagen
Period27/08/0030/08/00

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