@inproceedings{cb030ceab7b54957bfd4a5fa58d8bfb7,
title = "Air damping in resonant micromechanical capacitive sensors",
author = "Tomi Mattila and Jukka Kyyn{\"a}r{\"a}inen and Olli Jaakkola and Jyrki Kiiham{\"a}ki and Aarne Oja and Heikki Sepp{\"a} and Pekka Sepp{\"a}l{\"a} and Teuvo Sillanp{\"a}{\"a}",
year = "2000",
language = "English",
pages = "221--224",
booktitle = "Eurosensors XIV: the 14th European Conference on Solid-State Transducers",
publisher = "Technical University of Denmark DTU",
address = "Denmark",
note = "14th European Conference on Solid-State Transducers, EUROSENSORS XIV ; Conference date: 27-08-2000 Through 30-08-2000",
}