Air damping in resonant micromechanical capacitive sensors

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationEurosensors XIV: the 14th European Conference on Solid-State Transducers
Subtitle of host publicationProceedings
PublisherDanmarks Tekniske Universitet
Pages221-224
ISBN (Electronic)978-87-899-3550-8
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
Event14th European Conference on Solid-State Transducers, EUROSENSORS XIV - Copenhagen, Denmark
Duration: 27 Aug 200030 Aug 2000

Conference

Conference14th European Conference on Solid-State Transducers, EUROSENSORS XIV
CountryDenmark
CityCopenhagen
Period27/08/0030/08/00

Cite this

Mattila, T., Kyynäräinen, J., Jaakkola, O., Kiihamäki, J., Oja, A., Seppä, H., Seppälä, P., & Sillanpää, T. (2000). Air damping in resonant micromechanical capacitive sensors. In Eurosensors XIV: the 14th European Conference on Solid-State Transducers: Proceedings (pp. 221-224). Danmarks Tekniske Universitet.