Air damping in resonant micromechanical capacitive sensors

Tomi Mattila; Jukka Kyynäräinen; Olli Jaakkola; Jyrki Kiihamäki; Aarne Oja; Heikki Seppä; Pekka Seppälä; Teuvo Sillanpää

Air damping in resonant micromechanical capacitive sensors

Tomi Mattila, Jukka Kyynäräinen, Olli Jaakkola, Jyrki Kiihamäki, Aarne Oja, Heikki Seppä, Pekka Seppälä, Teuvo Sillanpää

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Eurosensors XIV: the 14th European Conference on Solid-State Transducers
Subtitle of host publication	Proceedings
Publisher	Technical University of Denmark DTU
Pages	221-224
ISBN (Electronic)	978-87-899-3550-8
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	14th European Conference on Solid-State Transducers, EUROSENSORS XIV - Copenhagen, Denmark Duration: 27 Aug 2000 → 30 Aug 2000

Conference

Conference	14th European Conference on Solid-State Transducers, EUROSENSORS XIV
Country/Territory	Denmark
City	Copenhagen
Period	27/08/00 → 30/08/00

Cite this

@inproceedings{cb030ceab7b54957bfd4a5fa58d8bfb7,

title = "Air damping in resonant micromechanical capacitive sensors",

author = "Tomi Mattila and Jukka Kyyn{\"a}r{\"a}inen and Olli Jaakkola and Jyrki Kiiham{\"a}ki and Aarne Oja and Heikki Sepp{\"a} and Pekka Sepp{\"a}l{\"a} and Teuvo Sillanp{\"a}{\"a}",

year = "2000",

language = "English",

pages = "221--224",

booktitle = "Eurosensors XIV: the 14th European Conference on Solid-State Transducers",

publisher = "Technical University of Denmark DTU",

address = "Denmark",

note = "14th European Conference on Solid-State Transducers, EUROSENSORS XIV ; Conference date: 27-08-2000 Through 30-08-2000",

}

Mattila, T , Kyynäräinen, J, Jaakkola, O, Kiihamäki, J, Oja, A, Seppä, H, Seppälä, P & Sillanpää, T 2000, Air damping in resonant micromechanical capacitive sensors. in Eurosensors XIV: the 14th European Conference on Solid-State Transducers: Proceedings. Technical University of Denmark DTU, pp. 221-224, 14th European Conference on Solid-State Transducers, EUROSENSORS XIV, Copenhagen, Denmark, 27/08/00.

Air damping in resonant micromechanical capacitive sensors. / Mattila, Tomi ; Kyynäräinen, Jukka; Jaakkola, Olli et al.

Eurosensors XIV: the 14th European Conference on Solid-State Transducers: Proceedings. Technical University of Denmark DTU, 2000. p. 221-224.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Air damping in resonant micromechanical capacitive sensors

AU - Mattila, Tomi

AU - Kyynäräinen, Jukka

AU - Jaakkola, Olli

AU - Kiihamäki, Jyrki

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Seppälä, Pekka

AU - Sillanpää, Teuvo

PY - 2000

Y1 - 2000

M3 - Conference article in proceedings

SP - 221

EP - 224

BT - Eurosensors XIV: the 14th European Conference on Solid-State Transducers

PB - Technical University of Denmark DTU

T2 - 14th European Conference on Solid-State Transducers, EUROSENSORS XIV

Y2 - 27 August 2000 through 30 August 2000

ER -