Air damping in resonant micromechanical capacitive sensors

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationEurosensors XIV: the 14th European Conference on Solid-State Transducers
    Subtitle of host publicationProceedings
    PublisherTechnical University of Denmark DTU
    Pages221-224
    ISBN (Electronic)978-87-899-3550-8
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    Event14th European Conference on Solid-State Transducers, EUROSENSORS XIV - Copenhagen, Denmark
    Duration: 27 Aug 200030 Aug 2000

    Conference

    Conference14th European Conference on Solid-State Transducers, EUROSENSORS XIV
    CountryDenmark
    CityCopenhagen
    Period27/08/0030/08/00

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