Air damping of oscillating MEMS structures: Modeling and comparison with experiment

Sergey Gorelick (Corresponding author), James R Dekker, Mikko Leivo, Uula Kantojärvi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30%) agreement between the simulated and measured Q-values
Original languageEnglish
Title of host publicationProceedings of the COMSOL 2013 conference
Number of pages6
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventCOMSOL Conference, Rotterdam - Rotterdam, Netherlands
Duration: 23 Oct 201325 Oct 2013

Conference

ConferenceCOMSOL Conference, Rotterdam
Abbreviated titleCOMSOL 2013
CountryNetherlands
CityRotterdam
Period23/10/1325/10/13

Fingerprint

MEMS
Damping
Air
Experiments
Resonators
Tuning
Computer simulation

Keywords

  • MEMS
  • air damping
  • FEM
  • tuning fork
  • micromirror

Cite this

Gorelick, S., Dekker, J. R., Leivo, M., & Kantojärvi, U. (2013). Air damping of oscillating MEMS structures: Modeling and comparison with experiment. In Proceedings of the COMSOL 2013 conference
Gorelick, Sergey ; Dekker, James R ; Leivo, Mikko ; Kantojärvi, Uula. / Air damping of oscillating MEMS structures : Modeling and comparison with experiment. Proceedings of the COMSOL 2013 conference. 2013.
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abstract = "Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30{\%}) agreement between the simulated and measured Q-values",
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Gorelick, S, Dekker, JR, Leivo, M & Kantojärvi, U 2013, Air damping of oscillating MEMS structures: Modeling and comparison with experiment. in Proceedings of the COMSOL 2013 conference. COMSOL Conference, Rotterdam, Rotterdam, Netherlands, 23/10/13.

Air damping of oscillating MEMS structures : Modeling and comparison with experiment. / Gorelick, Sergey (Corresponding author); Dekker, James R; Leivo, Mikko; Kantojärvi, Uula.

Proceedings of the COMSOL 2013 conference. 2013.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Gorelick, Sergey

AU - Dekker, James R

AU - Leivo, Mikko

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N1 - Project code: 75557

PY - 2013

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N2 - Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30%) agreement between the simulated and measured Q-values

AB - Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30%) agreement between the simulated and measured Q-values

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Gorelick S, Dekker JR, Leivo M, Kantojärvi U. Air damping of oscillating MEMS structures: Modeling and comparison with experiment. In Proceedings of the COMSOL 2013 conference. 2013