Abstract
Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30%) agreement between the simulated and measured Q-values.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the COMSOL 2013 conference |
| Number of pages | 6 |
| Publication status | Published - 2013 |
| MoE publication type | A4 Article in a conference publication |
| Event | COMSOL Conference, Rotterdam - Rotterdam, Netherlands Duration: 23 Oct 2013 → 25 Oct 2013 |
Conference
| Conference | COMSOL Conference, Rotterdam |
|---|---|
| Abbreviated title | COMSOL 2013 |
| Country/Territory | Netherlands |
| City | Rotterdam |
| Period | 23/10/13 → 25/10/13 |
Keywords
- MEMS
- air damping
- FEM
- tuning fork
- micromirror