Air damping of oscillating MEMS structures: Modeling and comparison with experiment

Sergey Gorelick (Corresponding author), James R Dekker, Mikko Leivo, Uula Kantojärvi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30%) agreement between the simulated and measured Q-values
Original languageEnglish
Title of host publicationProceedings of the COMSOL 2013 conference
Number of pages6
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventCOMSOL Conference, Rotterdam - Rotterdam, Netherlands
Duration: 23 Oct 201325 Oct 2013

Conference

ConferenceCOMSOL Conference, Rotterdam
Abbreviated titleCOMSOL 2013
CountryNetherlands
CityRotterdam
Period23/10/1325/10/13

Keywords

  • MEMS
  • air damping
  • FEM
  • tuning fork
  • micromirror

Fingerprint Dive into the research topics of 'Air damping of oscillating MEMS structures: Modeling and comparison with experiment'. Together they form a unique fingerprint.

Cite this