Air damping of oscillating MEMS structures: Modeling and comparison with experiment

Sergey Gorelick (Corresponding author), James R Dekker, Mikko Leivo, Uula Kantojärvi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    Air damping can be detrimental to the performance of vibrating MEMS components. Quantitative evaluation of the damping is challenging due to the complex interaction of air with moving structures and typically requires numerical simulations. A full three-dimensional analysis can be computationally very expensive, time consuming and not feasible. Here, we present a simplified two-dimensional modelling of damping per unit length of selected MEMS structures. The simulated air damping results were compared with experimental measurements of corresponding piezoactuated resonators: in-plane and out-of-plane tuning forks, two types of out-of-plane cantilevers and a torsional micromirror. The applicability of the simplified model is verified by a good (2-30%) agreement between the simulated and measured Q-values.
    Original languageEnglish
    Title of host publicationProceedings of the COMSOL 2013 conference
    Number of pages6
    Publication statusPublished - 2013
    MoE publication typeA4 Article in a conference publication
    EventCOMSOL Conference, Rotterdam - Rotterdam, Netherlands
    Duration: 23 Oct 201325 Oct 2013


    ConferenceCOMSOL Conference, Rotterdam
    Abbreviated titleCOMSOL 2013


    • MEMS
    • air damping
    • FEM
    • tuning fork
    • micromirror


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