Air damping of oscillating MEMS structures: Modeling and comparison with experiment

  • Sergey Gorelick*
  • , James R Dekker
  • , Mikko Leivo
  • , Uula Kantojärvi
    • *Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Fingerprint

    Dive into the research topics of 'Air damping of oscillating MEMS structures: Modeling and comparison with experiment'. Together they form a unique fingerprint.

    Keyphrases

    INIS

    Engineering