Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhen Zhu (Corresponding author), Saoussen Merdes, Kenichiro Mizohata, Oili M.E. Ylivaara, Mikko J. Heikkilä, Emma Salmi

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Original language	English
Publication status	Published - 25 Jun 2019
MoE publication type	Not Eligible
Event	Joint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg Duration: 24 Jun 2019 → 28 Jun 2019 https://www.eurocvd-balticald2019.lu

Conference	Joint EuroCVD 22 - Baltic ALD 16 conference 2019
Country/Territory	Luxembourg
Period	24/06/19 → 28/06/19
Internet address	https://www.eurocvd-balticald2019.lu

Keywords

@conference{5357df5ad9e240248f91778c38430fd5,

title = "Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications",

keywords = "ALD, OtaNano",

author = "Zhen Zhu and Saoussen Merdes and Kenichiro Mizohata and Ylivaara, {Oili M.E.} and Heikkil{\"a}, {Mikko J.} and Emma Salmi",

year = "2019",

month = jun,

day = "25",

language = "English",

note = "Joint EuroCVD 22 - Baltic ALD 16 conference 2019 ; Conference date: 24-06-2019 Through 28-06-2019",

url = "https://www.eurocvd-balticald2019.lu",

}

TY - CONF

T1 - Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

AU - Zhu, Zhen

AU - Merdes, Saoussen

AU - Mizohata, Kenichiro

AU - Ylivaara, Oili M.E.

AU - Heikkilä, Mikko J.

AU - Salmi, Emma

PY - 2019/6/25

Y1 - 2019/6/25

KW - ALD

KW - OtaNano

M3 - Conference Poster

T2 - Joint EuroCVD 22 - Baltic ALD 16 conference 2019

Y2 - 24 June 2019 through 28 June 2019

ER -