Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhen Zhu (Corresponding author), Saoussen Merdes, Kenichiro Mizohata, Oili M.E. Ylivaara, Mikko J. Heikkilä, Emma Salmi

Research output: Contribution to conferenceConference PosterScientificpeer-review

Original languageEnglish
Publication statusPublished - 25 Jun 2019
MoE publication typeNot Eligible
EventJoint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg
Duration: 24 Jun 201928 Jun 2019
https://www.eurocvd-balticald2019.lu

Conference

ConferenceJoint EuroCVD 22 - Baltic ALD 16 conference 2019
CountryLuxembourg
Period24/06/1928/06/19
Internet address

Keywords

  • ALD
  • OtaNano

Cite this

Zhu, Z., Merdes, S., Mizohata, K., Ylivaara, O. M. E., Heikkilä, M. J., & Salmi, E. (2019). Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.