Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhen Zhu (Corresponding author), Saoussen Merdes, Kenichiro Mizohata, Oili M.E. Ylivaara, Mikko J. Heikkilä, Emma Salmi

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 25 Jun 2019
    MoE publication typeNot Eligible
    EventJoint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg
    Duration: 24 Jun 201928 Jun 2019
    https://www.eurocvd-balticald2019.lu

    Conference

    ConferenceJoint EuroCVD 22 - Baltic ALD 16 conference 2019
    CountryLuxembourg
    Period24/06/1928/06/19
    Internet address

    Keywords

    • ALD
    • OtaNano

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