Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhen Zhu (Corresponding author), Saoussen Merdes, Kenichiro Mizohata, Oili M.E. Ylivaara, Mikko J. Heikkilä, Emma Salmi

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 25 Jun 2019
    MoE publication typeNot Eligible
    EventJoint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg
    Duration: 24 Jun 201928 Jun 2019
    https://www.eurocvd-balticald2019.lu

    Conference

    ConferenceJoint EuroCVD 22 - Baltic ALD 16 conference 2019
    CountryLuxembourg
    Period24/06/1928/06/19
    Internet address

    Keywords

    • ALD

    Cite this

    Zhu, Z., Merdes, S., Mizohata, K., Ylivaara, O. M. E., Heikkilä, M. J., & Salmi, E. (2019). Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
    Zhu, Zhen ; Merdes, Saoussen ; Mizohata, Kenichiro ; Ylivaara, Oili M.E. ; Heikkilä, Mikko J. ; Salmi, Emma. / Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
    @conference{5357df5ad9e240248f91778c38430fd5,
    title = "Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications",
    keywords = "ALD",
    author = "Zhen Zhu and Saoussen Merdes and Kenichiro Mizohata and Ylivaara, {Oili M.E.} and Heikkil{\"a}, {Mikko J.} and Emma Salmi",
    year = "2019",
    month = "6",
    day = "25",
    language = "English",
    note = "Joint EuroCVD 22 - Baltic ALD 16 conference 2019 ; Conference date: 24-06-2019 Through 28-06-2019",
    url = "https://www.eurocvd-balticald2019.lu",

    }

    Zhu, Z, Merdes, S, Mizohata, K, Ylivaara, OME, Heikkilä, MJ & Salmi, E 2019, 'Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications', Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg, 24/06/19 - 28/06/19.

    Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. / Zhu, Zhen (Corresponding author); Merdes, Saoussen; Mizohata, Kenichiro; Ylivaara, Oili M.E.; Heikkilä, Mikko J.; Salmi, Emma.

    2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    TY - CONF

    T1 - Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

    AU - Zhu, Zhen

    AU - Merdes, Saoussen

    AU - Mizohata, Kenichiro

    AU - Ylivaara, Oili M.E.

    AU - Heikkilä, Mikko J.

    AU - Salmi, Emma

    PY - 2019/6/25

    Y1 - 2019/6/25

    KW - ALD

    M3 - Conference Poster

    ER -

    Zhu Z, Merdes S, Mizohata K, Ylivaara OME, Heikkilä MJ, Salmi E. Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. 2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.