Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhen Zhu (Corresponding author), Saoussen Merdes, Kenichiro Mizohata, Oili M.E. Ylivaara, Mikko J. Heikkilä, Emma Salmi

Research output: Contribution to conferenceConference PosterScientificpeer-review

Original languageEnglish
Publication statusPublished - 25 Jun 2019
MoE publication typeNot Eligible
EventJoint EuroCVD 22 - Baltic ALD 16 conference 2019 - Luxembourg, Luxembourg
Duration: 24 Jun 201928 Jun 2019
https://www.eurocvd-balticald2019.lu

Conference

ConferenceJoint EuroCVD 22 - Baltic ALD 16 conference 2019
CountryLuxembourg
Period24/06/1928/06/19
Internet address

Keywords

  • ALD

Cite this

Zhu, Z., Merdes, S., Mizohata, K., Ylivaara, O. M. E., Heikkilä, M. J., & Salmi, E. (2019). Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
Zhu, Zhen ; Merdes, Saoussen ; Mizohata, Kenichiro ; Ylivaara, Oili M.E. ; Heikkilä, Mikko J. ; Salmi, Emma. / Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.
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title = "Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications",
keywords = "ALD",
author = "Zhen Zhu and Saoussen Merdes and Kenichiro Mizohata and Ylivaara, {Oili M.E.} and Heikkil{\"a}, {Mikko J.} and Emma Salmi",
year = "2019",
month = "6",
day = "25",
language = "English",
note = "Joint EuroCVD 22 - Baltic ALD 16 conference 2019 ; Conference date: 24-06-2019 Through 28-06-2019",
url = "https://www.eurocvd-balticald2019.lu",

}

Zhu, Z, Merdes, S, Mizohata, K, Ylivaara, OME, Heikkilä, MJ & Salmi, E 2019, 'Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications' Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg, 24/06/19 - 28/06/19, .

Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. / Zhu, Zhen (Corresponding author); Merdes, Saoussen; Mizohata, Kenichiro; Ylivaara, Oili M.E.; Heikkilä, Mikko J.; Salmi, Emma.

2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.

Research output: Contribution to conferenceConference PosterScientificpeer-review

TY - CONF

T1 - Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

AU - Zhu, Zhen

AU - Merdes, Saoussen

AU - Mizohata, Kenichiro

AU - Ylivaara, Oili M.E.

AU - Heikkilä, Mikko J.

AU - Salmi, Emma

PY - 2019/6/25

Y1 - 2019/6/25

KW - ALD

M3 - Conference Poster

ER -

Zhu Z, Merdes S, Mizohata K, Ylivaara OME, Heikkilä MJ, Salmi E. Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications. 2019. Poster session presented at Joint EuroCVD 22 - Baltic ALD 16 conference 2019, Luxembourg.