Al2O3-TiO2 nanolaminates for MEMS and optical applications: Combining the trimethylaluminum/water and titanium tetrachloride/water ALD processes

Riikka Puurunen, Hannu Kattelus, Jaakko Saarilahti, Kimmo Solehmainen, Sven Lindfors, Pekka J. Soininen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Physics & Astronomy