Al2O3-TiO2 nanolaminates for MEMS and optical applications: Combining the trimethylaluminum/water and titanium tetrachloride/water ALD processes

Riikka Puurunen, Hannu Kattelus, Jaakko Saarilahti, Kimmo Solehmainen, Sven Lindfors, Pekka J. Soininen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Fingerprint

    Dive into the research topics of 'Al2O3-TiO2 nanolaminates for MEMS and optical applications: Combining the trimethylaluminum/water and titanium tetrachloride/water ALD processes'. Together they form a unique fingerprint.

    Keyphrases

    INIS

    Engineering

    Material Science