Al2O3/TiO2 Nanolaminates by Atomic Layer Deposition: A Study on the Laminate Structure and Mechanical Property

Xuwen Liu (Corresponding author), Sakari Sintonen, Eero Haimi, Mikko Laitinen, Saima Ali, Jaakko Julin, Oili Ylivaara, Harri Lipsanen, Timo Sajavaara, Riikka L. Puurunen, Simo-Pekka Hannula

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Abstract

    hree sets of 100 nm thick ALD Al2O3-TiO2 nanolaminates were deposited on 150 mm p-type (001) silicon wafers. Bilayer thickness (0.1 to 50 nm), volume per cent of TiO2 (0 to 100%) and ALD temperature (110-300oC) were the variables in each corresponding set. The laminate hardness and elastic modulus were measured by nanoindentation under displacement control. X-ray reflectivity (XRR) was used for the thickness of each alternating layer, the density of each phase as well as the surface roughness at the interfaces. Time-of-flight elastic recoil detection analysis (TOF-ERDA) was used for the through-laminate impurity. Incorporating TiO2 into Al2O3 reduced the film hardness. The TiO2 content had a complex effect to the elastic modulus of the film. Better understanding of the subtle influence of the laminate structure and composition to the film property is reached by combining the information on the physical and chemical state of each individual layer.
    Original languageEnglish
    Title of host publicationInternational Workshop on the Mechanical Behavior of Nanoscale Multilayers
    Publication statusPublished - 2013
    EventInternational Workshop on the Mechanical Behavior of Nanoscale Multilayers, Nanoscale Multilayers’13 - Madrid, Spain
    Duration: 1 Oct 20134 Oct 2013
    http://www.tms.org/meetings/2013/NanoscaleMultilayers13/

    Workshop

    WorkshopInternational Workshop on the Mechanical Behavior of Nanoscale Multilayers, Nanoscale Multilayers’13
    Abbreviated titleNanoscale Multilayers’13
    CountrySpain
    CityMadrid
    Period1/10/134/10/13
    Internet address

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    Cite this

    Liu, X., Sintonen, S., Haimi, E., Laitinen, M., Ali, S., Julin, J., Ylivaara, O., Lipsanen, H., Sajavaara, T., Puurunen, R. L., & Hannula, S-P. (2013). Al2O3/TiO2 Nanolaminates by Atomic Layer Deposition: A Study on the Laminate Structure and Mechanical Property. In International Workshop on the Mechanical Behavior of Nanoscale Multilayers