ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion
Oili Ylivaara*, Xuwen Liu, Lauri Kilpi, Jussi Lyytinen, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Maria Berdova, Eero Haimi, Timo Sajavaara, Helena Ronkainen, Harri Lipsanen, Jari Koskinen, Simo-Pekka Hannula, Riikka L. Puurunen
Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
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