ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion

Oili Ylivaara*, Xuwen Liu, Lauri Kilpi, Jussi Lyytinen, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Maria Berdova, Eero Haimi, Timo Sajavaara, Helena Ronkainen, Harri Lipsanen, Jari Koskinen, Simo-Pekka Hannula, Riikka L. Puurunen

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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