ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion: residual stress, elastic modulus, hardness and adhesion

Oili Ylivaara (Corresponding author), Xuwen Liu, Lauri Kilpi, Jussi Lyytinen, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Maria Berdova, Eero Haimi, Timo Sajavaara, Helena Ronkainen, Harri Lipsanen, Jari Koskinen, Simo-Pekka Hannula, Riikka L. Puurunen

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    Physics & Astronomy