ALD Al2O3 from TMA and water on Si: residual stress, elastic modulus, hardness and adhesion

  • Oili Ylivaara*
  • , Xuwen Liu
  • , Lauri Kilpi
  • , Jussi Lyytinen
  • , Dieter Schneider
  • , Mikko Laitinen
  • , Jaakko Julin
  • , Saima Ali
  • , Sakari Sintonen
  • , Maria Berdova
  • , Eero Haimi
  • , Timo Sajavaara
  • , Helena Ronkainen
  • , Harri Lipsanen
  • , Jari Koskinen
  • , Simo-Pekka Hannula
  • , Riikka L. Puurunen
    • *Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

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