ALD coating of porous silicon

Kestutis Grigoras; J. Keskinen; Elina Yli-Rantala; S. Laakso; H. Välimäki; P. Kauranen; Jouni Ahopelto; Mika Prunnila

ALD coating of porous silicon

Kestutis Grigoras, J. Keskinen, Elina Yli-Rantala, S. Laakso, H. Välimäki, P. Kauranen, Jouni Ahopelto, Mika Prunnila

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Abstract

Atomic layer deposition of thin TiN layer inside the porous silicon electrodes improves conductivity and passivates surface of porous silicon. This improves capacitance and stability of porous silicon based supercapacitors.

Original language	English
Title of host publication	BALD2014 Abstract book
Publication status	Published - 2014
Event	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12 http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated title	Baltic ALD 2014
Country/Territory	Finland
City	Helsinki
Period	12/05/14 → 13/05/14
Other	Abstracts reviewed and published.
Internet address	http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Keywords

porous silicon
ALD
supercapacitor

Cite this

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title = "ALD coating of porous silicon",

abstract = "Atomic layer deposition of thin TiN layer inside the porous silicon electrodes improves conductivity and passivates surface of porous silicon. This improves capacitance and stability of porous silicon based supercapacitors.",

keywords = "porous silicon, ALD, supercapacitor",

author = "Kestutis Grigoras and J. Keskinen and Elina Yli-Rantala and S. Laakso and H. V{\"a}lim{\"a}ki and P. Kauranen and Jouni Ahopelto and Mika Prunnila",

note = "Project code: 73742, abstract reviewed; 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Baltic ALD 2014 ; Conference date: 12-05-2014 Through 13-05-2014",

year = "2014",

language = "English",

booktitle = "BALD2014 Abstract book",

url = "http://www.aldcoe.fi/bald2014/program.pdf, http://www.aldcoe.fi/bald2014/posters.pdf",

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TY - CHAP

T1 - ALD coating of porous silicon

AU - Grigoras, Kestutis

AU - Keskinen, J.

AU - Yli-Rantala, Elina

AU - Laakso, S.

AU - Välimäki, H.

AU - Kauranen, P.

AU - Ahopelto, Jouni

AU - Prunnila, Mika

N1 - Conference code: 12

PY - 2014

Y1 - 2014

N2 - Atomic layer deposition of thin TiN layer inside the porous silicon electrodes improves conductivity and passivates surface of porous silicon. This improves capacitance and stability of porous silicon based supercapacitors.

AB - Atomic layer deposition of thin TiN layer inside the porous silicon electrodes improves conductivity and passivates surface of porous silicon. This improves capacitance and stability of porous silicon based supercapacitors.

KW - porous silicon

KW - ALD

KW - supercapacitor

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

T2 - 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014

Y2 - 12 May 2014 through 13 May 2014

ER -

ALD coating of porous silicon

Abstract

Conference

Keywords

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Cite this