ALD coating of porous silicon

Kestutis Grigoras, J. Keskinen, Elina Yli-Rantala, S. Laakso, H. Välimäki, P. Kauranen, Jouni Ahopelto, Mika Prunnila

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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    Physics & Astronomy