ALD coating of porous silicon

Kestutis Grigoras, J. Keskinen, Elina Yli-Rantala, S. Laakso, H. Välimäki, P. Kauranen, Jouni Ahopelto, Mika Prunnila

    Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

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    Material Science

    Chemical Engineering