ALD enhanced on-chip supercapacitors

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	3rd International Conference on ALD Applications & 2016 China ALD Conference - Suzhou, China Duration: 16 Oct 2016 → 19 Oct 2016

Conference	3rd International Conference on ALD Applications & 2016 China ALD Conference
Country/Territory	China
City	Suzhou
Period	16/10/16 → 19/10/16

Keywords

@conference{8707aaa584ec4c5b85e1f63bd83cdfa4,

title = "ALD enhanced on-chip supercapacitors",

keywords = "otanano",

author = "Mika Prunnila and Jouni Ahopelto and Leif Gr{\"o}nberg and Kestutis Grigoras",

year = "2016",

language = "English",

note = "3rd International Conference on ALD Applications & 2016 China ALD Conference ; Conference date: 16-10-2016 Through 19-10-2016",

}