ALD enhanced on-chip supercapacitors

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2016
    Event3rd International Conference on ALD Applications & 2016 China ALD Conference - Suzhou, China
    Duration: 16 Oct 201619 Oct 2016

    Conference

    Conference3rd International Conference on ALD Applications & 2016 China ALD Conference
    CountryChina
    CitySuzhou
    Period16/10/1619/10/16

    Cite this

    Prunnila, M., Ahopelto, J., Grönberg, L., & Grigoras, K. (2016). ALD enhanced on-chip supercapacitors. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.
    Prunnila, Mika ; Ahopelto, Jouni ; Grönberg, Leif ; Grigoras, Kestutis. / ALD enhanced on-chip supercapacitors. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.
    @conference{8707aaa584ec4c5b85e1f63bd83cdfa4,
    title = "ALD enhanced on-chip supercapacitors",
    author = "Mika Prunnila and Jouni Ahopelto and Leif Gr{\"o}nberg and Kestutis Grigoras",
    year = "2016",
    language = "English",
    note = "3rd International Conference on ALD Applications & 2016 China ALD Conference ; Conference date: 16-10-2016 Through 19-10-2016",

    }

    Prunnila, M, Ahopelto, J, Grönberg, L & Grigoras, K 2016, 'ALD enhanced on-chip supercapacitors', Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China, 16/10/16 - 19/10/16.

    ALD enhanced on-chip supercapacitors. / Prunnila, Mika; Ahopelto, Jouni; Grönberg, Leif; Grigoras, Kestutis.

    2016. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.

    Research output: Contribution to conferenceConference articleScientific

    TY - CONF

    T1 - ALD enhanced on-chip supercapacitors

    AU - Prunnila, Mika

    AU - Ahopelto, Jouni

    AU - Grönberg, Leif

    AU - Grigoras, Kestutis

    PY - 2016

    Y1 - 2016

    M3 - Conference article

    ER -

    Prunnila M, Ahopelto J, Grönberg L, Grigoras K. ALD enhanced on-chip supercapacitors. 2016. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.