ALD enhanced on-chip supercapacitors

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2016
    Event3rd International Conference on ALD Applications & 2016 China ALD Conference - Suzhou, China
    Duration: 16 Oct 201619 Oct 2016

    Conference

    Conference3rd International Conference on ALD Applications & 2016 China ALD Conference
    CountryChina
    CitySuzhou
    Period16/10/1619/10/16

    Cite this

    Prunnila, M., Ahopelto, J., Grönberg, L., & Grigoras, K. (2016). ALD enhanced on-chip supercapacitors. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.