ALD enhanced on-chip supercapacitors

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2016
Event3rd International Conference on ALD Applications & 2016 China ALD Conference - Suzhou, China
Duration: 16 Oct 201619 Oct 2016

Conference

Conference3rd International Conference on ALD Applications & 2016 China ALD Conference
CountryChina
CitySuzhou
Period16/10/1619/10/16

Cite this

Prunnila, M., Ahopelto, J., Grönberg, L., & Grigoras, K. (2016). ALD enhanced on-chip supercapacitors. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.
Prunnila, Mika ; Ahopelto, Jouni ; Grönberg, Leif ; Grigoras, Kestutis. / ALD enhanced on-chip supercapacitors. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.
@conference{8707aaa584ec4c5b85e1f63bd83cdfa4,
title = "ALD enhanced on-chip supercapacitors",
author = "Mika Prunnila and Jouni Ahopelto and Leif Gr{\"o}nberg and Kestutis Grigoras",
year = "2016",
language = "English",
note = "3rd International Conference on ALD Applications & 2016 China ALD Conference ; Conference date: 16-10-2016 Through 19-10-2016",

}

Prunnila, M, Ahopelto, J, Grönberg, L & Grigoras, K 2016, 'ALD enhanced on-chip supercapacitors' Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China, 16/10/16 - 19/10/16, .

ALD enhanced on-chip supercapacitors. / Prunnila, Mika; Ahopelto, Jouni; Grönberg, Leif; Grigoras, Kestutis.

2016. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - ALD enhanced on-chip supercapacitors

AU - Prunnila, Mika

AU - Ahopelto, Jouni

AU - Grönberg, Leif

AU - Grigoras, Kestutis

PY - 2016

Y1 - 2016

M3 - Conference article

ER -

Prunnila M, Ahopelto J, Grönberg L, Grigoras K. ALD enhanced on-chip supercapacitors. 2016. Paper presented at 3rd International Conference on ALD Applications & 2016 China ALD Conference, Suzhou, China.