ALD membrane strength measurement with a stylus profilometer

Feng Gao; Riikka Puurunen; Anssi Laukkanen; Lauri Kilpi; Helena Ronkainen; Jyrki Kiihamäki

ALD membrane strength measurement with a stylus profilometer

Feng Gao, Riikka Puurunen, Anssi Laukkanen, Lauri Kilpi, Helena Ronkainen, Jyrki Kiihamäki

Research output: Contribution to conference › Conference Poster › Scientific

Original language	English
Publication status	Published - 2013
MoE publication type	Not Eligible
Event	13th International Conference on Atomic Layer Deposition, ALD 2013 - San Diego, California, San Diego, United States Duration: 28 Jul 2013 → 31 Jul 2013 Conference number: 13

Conference

Conference	13th International Conference on Atomic Layer Deposition, ALD 2013
Abbreviated title	ALD 2013
Country/Territory	United States
City	San Diego
Period	28/07/13 → 31/07/13

Cite this

@conference{55245c80360948cd8c6e4ec6934b9928,

title = "ALD membrane strength measurement with a stylus profilometer",

author = "Feng Gao and Riikka Puurunen and Anssi Laukkanen and Lauri Kilpi and Helena Ronkainen and Jyrki Kiiham{\"a}ki",

note = "Project code: 73742; 13th International Conference on Atomic Layer Deposition, ALD 2013, ALD 2013 ; Conference date: 28-07-2013 Through 31-07-2013",

year = "2013",

language = "English",

}

TY - CONF

T1 - ALD membrane strength measurement with a stylus profilometer

AU - Gao, Feng

AU - Puurunen, Riikka

AU - Laukkanen, Anssi

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Kiihamäki, Jyrki

N1 - Conference code: 13

PY - 2013

Y1 - 2013

M3 - Conference Poster

T2 - 13th International Conference on Atomic Layer Deposition, ALD 2013

Y2 - 28 July 2013 through 31 July 2013

ER -