ALD membrane strength measurement with a stylus profilometer

Research output: Contribution to conferenceConference PosterScientific

Original languageEnglish
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event13th International Conference on Atomic Layer Deposition, ALD 2013 - San Diego, California, San Diego, United States
Duration: 28 Jul 201331 Jul 2013
Conference number: 13

Conference

Conference13th International Conference on Atomic Layer Deposition, ALD 2013
Abbreviated titleALD 2013
CountryUnited States
CitySan Diego
Period28/07/1331/07/13

Cite this

Gao, F., Puurunen, R., Laukkanen, A., Kilpi, L., Ronkainen, H., & Kiihamäki, J. (2013). ALD membrane strength measurement with a stylus profilometer. Poster session presented at 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.
Gao, Feng ; Puurunen, Riikka ; Laukkanen, Anssi ; Kilpi, Lauri ; Ronkainen, Helena ; Kiihamäki, Jyrki. / ALD membrane strength measurement with a stylus profilometer. Poster session presented at 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.
@conference{55245c80360948cd8c6e4ec6934b9928,
title = "ALD membrane strength measurement with a stylus profilometer",
author = "Feng Gao and Riikka Puurunen and Anssi Laukkanen and Lauri Kilpi and Helena Ronkainen and Jyrki Kiiham{\"a}ki",
note = "Project code: 73742; 13th International Conference on Atomic Layer Deposition, ALD 2013, ALD 2013 ; Conference date: 28-07-2013 Through 31-07-2013",
year = "2013",
language = "English",

}

Gao, F, Puurunen, R, Laukkanen, A, Kilpi, L, Ronkainen, H & Kiihamäki, J 2013, 'ALD membrane strength measurement with a stylus profilometer' 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States, 28/07/13 - 31/07/13, .

ALD membrane strength measurement with a stylus profilometer. / Gao, Feng; Puurunen, Riikka; Laukkanen, Anssi; Kilpi, Lauri; Ronkainen, Helena; Kiihamäki, Jyrki.

2013. Poster session presented at 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.

Research output: Contribution to conferenceConference PosterScientific

TY - CONF

T1 - ALD membrane strength measurement with a stylus profilometer

AU - Gao, Feng

AU - Puurunen, Riikka

AU - Laukkanen, Anssi

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Kiihamäki, Jyrki

N1 - Project code: 73742

PY - 2013

Y1 - 2013

M3 - Conference Poster

ER -

Gao F, Puurunen R, Laukkanen A, Kilpi L, Ronkainen H, Kiihamäki J. ALD membrane strength measurement with a stylus profilometer. 2013. Poster session presented at 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.