ALD membrane strength measurement with a stylus profilometer

Research output: Contribution to conferenceConference PosterScientific

Original languageEnglish
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event13th International Conference on Atomic Layer Deposition, ALD 2013 - San Diego, California, San Diego, United States
Duration: 28 Jul 201331 Jul 2013
Conference number: 13

Conference

Conference13th International Conference on Atomic Layer Deposition, ALD 2013
Abbreviated titleALD 2013
CountryUnited States
CitySan Diego
Period28/07/1331/07/13

Cite this

Gao, F., Puurunen, R., Laukkanen, A., Kilpi, L., Ronkainen, H., & Kiihamäki, J. (2013). ALD membrane strength measurement with a stylus profilometer. Poster session presented at 13th International Conference on Atomic Layer Deposition, ALD 2013, San Diego, United States.