ALD thin films in MEMS Fabry-Perot interferometers

Anna Rissanen, Martti Blomberg, Riikka Puurunen, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationJune 20 - 23, 2010, Seoul, Korea
Publication statusPublished - 2010
MoE publication typeNot Eligible
Event10th International Conference on Atomic Layer Deposition, ALD 2010 - Seoul, Korea, Republic of
Duration: 20 Jun 201023 Jun 2010
Conference number: 10

Conference

Conference10th International Conference on Atomic Layer Deposition, ALD 2010
Abbreviated titleALD 2010
CountryKorea, Republic of
CitySeoul
Period20/06/1023/06/10

Cite this

Rissanen, A., Blomberg, M., Puurunen, R., & Kattelus, H. (2010). ALD thin films in MEMS Fabry-Perot interferometers. In Proceedings: June 20 - 23, 2010, Seoul, Korea
Rissanen, Anna ; Blomberg, Martti ; Puurunen, Riikka ; Kattelus, Hannu. / ALD thin films in MEMS Fabry-Perot interferometers. Proceedings: June 20 - 23, 2010, Seoul, Korea. 2010.
@inproceedings{873fbe71f7bf4c7aa6df63825add59b7,
title = "ALD thin films in MEMS Fabry-Perot interferometers",
author = "Anna Rissanen and Martti Blomberg and Riikka Puurunen and Hannu Kattelus",
note = "Proc. on a DVD/CD-ROM",
year = "2010",
language = "English",
booktitle = "Proceedings",

}

Rissanen, A, Blomberg, M, Puurunen, R & Kattelus, H 2010, ALD thin films in MEMS Fabry-Perot interferometers. in Proceedings: June 20 - 23, 2010, Seoul, Korea. 10th International Conference on Atomic Layer Deposition, ALD 2010, Seoul, Korea, Republic of, 20/06/10.

ALD thin films in MEMS Fabry-Perot interferometers. / Rissanen, Anna; Blomberg, Martti; Puurunen, Riikka; Kattelus, Hannu.

Proceedings: June 20 - 23, 2010, Seoul, Korea. 2010.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - ALD thin films in MEMS Fabry-Perot interferometers

AU - Rissanen, Anna

AU - Blomberg, Martti

AU - Puurunen, Riikka

AU - Kattelus, Hannu

N1 - Proc. on a DVD/CD-ROM

PY - 2010

Y1 - 2010

M3 - Conference article in proceedings

BT - Proceedings

ER -

Rissanen A, Blomberg M, Puurunen R, Kattelus H. ALD thin films in MEMS Fabry-Perot interferometers. In Proceedings: June 20 - 23, 2010, Seoul, Korea. 2010