ALD thin films in MEMS Fabry-Perot interferometers

Anna Rissanen, Martti Blomberg, Riikka Puurunen, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationJune 20 - 23, 2010, Seoul, Korea
    Publication statusPublished - 2010
    MoE publication typeNot Eligible
    Event10th International Conference on Atomic Layer Deposition, ALD 2010 - Seoul, Korea, Republic of
    Duration: 20 Jun 201023 Jun 2010
    Conference number: 10

    Conference

    Conference10th International Conference on Atomic Layer Deposition, ALD 2010
    Abbreviated titleALD 2010
    CountryKorea, Republic of
    CitySeoul
    Period20/06/1023/06/10

    Cite this

    Rissanen, A., Blomberg, M., Puurunen, R., & Kattelus, H. (2010). ALD thin films in MEMS Fabry-Perot interferometers. In Proceedings: June 20 - 23, 2010, Seoul, Korea
    Rissanen, Anna ; Blomberg, Martti ; Puurunen, Riikka ; Kattelus, Hannu. / ALD thin films in MEMS Fabry-Perot interferometers. Proceedings: June 20 - 23, 2010, Seoul, Korea. 2010.
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    title = "ALD thin films in MEMS Fabry-Perot interferometers",
    author = "Anna Rissanen and Martti Blomberg and Riikka Puurunen and Hannu Kattelus",
    note = "Proc. on a DVD/CD-ROM",
    year = "2010",
    language = "English",
    booktitle = "Proceedings",

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    Rissanen, A, Blomberg, M, Puurunen, R & Kattelus, H 2010, ALD thin films in MEMS Fabry-Perot interferometers. in Proceedings: June 20 - 23, 2010, Seoul, Korea. 10th International Conference on Atomic Layer Deposition, ALD 2010, Seoul, Korea, Republic of, 20/06/10.

    ALD thin films in MEMS Fabry-Perot interferometers. / Rissanen, Anna; Blomberg, Martti; Puurunen, Riikka; Kattelus, Hannu.

    Proceedings: June 20 - 23, 2010, Seoul, Korea. 2010.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    TY - GEN

    T1 - ALD thin films in MEMS Fabry-Perot interferometers

    AU - Rissanen, Anna

    AU - Blomberg, Martti

    AU - Puurunen, Riikka

    AU - Kattelus, Hannu

    N1 - Proc. on a DVD/CD-ROM

    PY - 2010

    Y1 - 2010

    M3 - Conference article in proceedings

    BT - Proceedings

    ER -

    Rissanen A, Blomberg M, Puurunen R, Kattelus H. ALD thin films in MEMS Fabry-Perot interferometers. In Proceedings: June 20 - 23, 2010, Seoul, Korea. 2010