ALD thin films in MEMS Fabry-Perot interferometers

Anna Rissanen, Martti Blomberg, Riikka Puurunen, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationJune 20 - 23, 2010, Seoul, Korea
    Publication statusPublished - 2010
    MoE publication typeNot Eligible
    Event10th International Conference on Atomic Layer Deposition, ALD 2010 - Seoul, Korea, Republic of
    Duration: 20 Jun 201023 Jun 2010
    Conference number: 10

    Conference

    Conference10th International Conference on Atomic Layer Deposition, ALD 2010
    Abbreviated titleALD 2010
    CountryKorea, Republic of
    CitySeoul
    Period20/06/1023/06/10

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