ALD thin films in MEMS Fabry-Perot interferometers

Anna Rissanen; Martti Blomberg; Riikka Puurunen; Hannu Kattelus

ALD thin films in MEMS Fabry-Perot interferometers

Anna Rissanen
, Martti Blomberg
, Riikka Puurunen
, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	June 20 - 23, 2010, Seoul, Korea
Publication status	Published - 2010
MoE publication type	Not Eligible
Event	10th International Conference on Atomic Layer Deposition, ALD 2010 - Seoul, Korea, Republic of Duration: 20 Jun 2010 → 23 Jun 2010 Conference number: 10

Conference

Conference	10th International Conference on Atomic Layer Deposition, ALD 2010
Abbreviated title	ALD 2010
Country/Territory	Korea, Republic of
City	Seoul
Period	20/06/10 → 23/06/10

Cite this

@inproceedings{873fbe71f7bf4c7aa6df63825add59b7,

title = "ALD thin films in MEMS Fabry-Perot interferometers",

author = "Anna Rissanen and Martti Blomberg and Riikka Puurunen and Hannu Kattelus",

note = "Proc. on a DVD/CD-ROM; 10th International Conference on Atomic Layer Deposition, ALD 2010, ALD 2010 ; Conference date: 20-06-2010 Through 23-06-2010",

year = "2010",

language = "English",

booktitle = "Proceedings",

}