Abstract
Despite the tremendous advances in micro- and nanoelectronics and the fast-pacing advances in photonic circuit designs, seamless monolithic integration of electronic and photonic components on single chips still remains elusive. In this work, a radically designed silicon-based chip that monolithically integrates in a 37 mm2 footprint 10 interferometric optical sensors along with their respective optical sources, spectral analyzers, and photodetector arrays is presented. The chip is fabricated with mainstream CMOS-compatible fabrication techniques and employs optical devices operating in the visible/infrared spectrum and waveguides with a critical dimension of 1.0 μm. In addition, it exploits the newly introduced detection principle of broad-band Mach-Zehnder interferometry that surpasses the stringent requirement for external monochromatic sources and inherent limitations of traditional interferometry and introduces alternative designs of on-chip spectral analyzers and mode-filtering components, aspiring thus to become a novel lab-on-a-chip that can address the needs of next-generation analytical systems. Apart from the conceptual design, novel photonic features, fabrication steps, and out-of-the-box system development that circumvents the need for fluidic interfacing and employs only electrical interconnects, the present work tests the potential of the fully spectroscopic chip for analytical applications through real-time monitoring of immunochemical reactions and demonstrates limits of detection for antimouse IgG antibody and CRP of 60 and 8 pM, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 1694-1705 |
| Number of pages | 12 |
| Journal | ACS Photonics |
| Volume | 6 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 13 Jun 2019 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- Broad-band interferometry
- Lab-on-chip
- Optical biosensing
- Photonic circuit
- Photonics-microelectronic integration
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All-Silicon Spectrally Resolved Interferometric Circuit for Multiplexed Diagnostics : A Monolithic Lab-on-a-Chip Integrating All Active and Passive Components. / Misiakos, Konstantinos; Makarona, Eleni; Hoekman, Marcel; Fyrogenis, Romanos; Tukkiniemi, Kari; Jobst, Gerhard; Petrou, Panagiota Sotirios; Kakabakos, Sotirios Elias; Salapatas, Alexandros; Goustouridis, Dimitrios; Harjanne, Mikko; Heimala, Paivi; Raptis, Ioannis (Corresponding Author).
In: ACS Photonics, Vol. 6, No. 7, 13.06.2019, p. 1694-1705.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - All-Silicon Spectrally Resolved Interferometric Circuit for Multiplexed Diagnostics
T2 - A Monolithic Lab-on-a-Chip Integrating All Active and Passive Components
AU - Misiakos, Konstantinos
AU - Makarona, Eleni
AU - Hoekman, Marcel
AU - Fyrogenis, Romanos
AU - Tukkiniemi, Kari
AU - Jobst, Gerhard
AU - Petrou, Panagiota Sotirios
AU - Kakabakos, Sotirios Elias
AU - Salapatas, Alexandros
AU - Goustouridis, Dimitrios
AU - Harjanne, Mikko
AU - Heimala, Paivi
AU - Raptis, Ioannis
PY - 2019/6/13
Y1 - 2019/6/13
N2 - Despite the tremendous advances in micro- and nanoelectronics and the fast-pacing advances in photonic circuit designs, seamless monolithic integration of electronic and photonic components on single chips still remains elusive. In this work, a radically designed silicon-based chip that monolithically integrates in a 37 mm2 footprint 10 interferometric optical sensors along with their respective optical sources, spectral analyzers, and photodetector arrays is presented. The chip is fabricated with mainstream CMOS-compatible fabrication techniques and employs optical devices operating in the visible/infrared spectrum and waveguides with a critical dimension of 1.0 μm. In addition, it exploits the newly introduced detection principle of broad-band Mach-Zehnder interferometry that surpasses the stringent requirement for external monochromatic sources and inherent limitations of traditional interferometry and introduces alternative designs of on-chip spectral analyzers and mode-filtering components, aspiring thus to become a novel lab-on-a-chip that can address the needs of next-generation analytical systems. Apart from the conceptual design, novel photonic features, fabrication steps, and out-of-the-box system development that circumvents the need for fluidic interfacing and employs only electrical interconnects, the present work tests the potential of the fully spectroscopic chip for analytical applications through real-time monitoring of immunochemical reactions and demonstrates limits of detection for antimouse IgG antibody and CRP of 60 and 8 pM, respectively.
AB - Despite the tremendous advances in micro- and nanoelectronics and the fast-pacing advances in photonic circuit designs, seamless monolithic integration of electronic and photonic components on single chips still remains elusive. In this work, a radically designed silicon-based chip that monolithically integrates in a 37 mm2 footprint 10 interferometric optical sensors along with their respective optical sources, spectral analyzers, and photodetector arrays is presented. The chip is fabricated with mainstream CMOS-compatible fabrication techniques and employs optical devices operating in the visible/infrared spectrum and waveguides with a critical dimension of 1.0 μm. In addition, it exploits the newly introduced detection principle of broad-band Mach-Zehnder interferometry that surpasses the stringent requirement for external monochromatic sources and inherent limitations of traditional interferometry and introduces alternative designs of on-chip spectral analyzers and mode-filtering components, aspiring thus to become a novel lab-on-a-chip that can address the needs of next-generation analytical systems. Apart from the conceptual design, novel photonic features, fabrication steps, and out-of-the-box system development that circumvents the need for fluidic interfacing and employs only electrical interconnects, the present work tests the potential of the fully spectroscopic chip for analytical applications through real-time monitoring of immunochemical reactions and demonstrates limits of detection for antimouse IgG antibody and CRP of 60 and 8 pM, respectively.
KW - Broad-band interferometry
KW - Lab-on-chip
KW - Optical biosensing
KW - Photonic circuit
KW - Photonics-microelectronic integration
UR - http://www.scopus.com/inward/record.url?scp=85072944856&partnerID=8YFLogxK
U2 - 10.1021/acsphotonics.9b00235
DO - 10.1021/acsphotonics.9b00235
M3 - Article
AN - SCOPUS:85072944856
VL - 6
SP - 1694
EP - 1705
JO - ACS Photonics
JF - ACS Photonics
SN - 2330-4022
IS - 7
ER -