Alumina and LTCC technology for RF MEMS switches and true time delay lines

R. Buttiglione, S. Catoni, G. De Angelis, M. Dispenza, A. Fiorello, Kari Kautio, Manu Lahdes, R. Marcelli, Kari Rönkä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

The technology for the realisation of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations.
Original languageEnglish
Title of host publicationProceedings of the 3rd European Microwave Integrated Circuit Conference, EuMIC 2008
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages366-369
ISBN (Print)978-2-87487-007-1
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
Event3rd European Microwave Integrated Circuit Conference, EuMIC 2008 - Amsterdam, Netherlands
Duration: 27 Oct 200828 Oct 2008

Conference

Conference3rd European Microwave Integrated Circuit Conference, EuMIC 2008
Abbreviated titleEuMIC 2008
CountryNetherlands
CityAmsterdam
Period27/10/0828/10/08

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