Alumina and LTCC technology for RF MEMS switches and true time delay lines

R. Buttiglione, S. Catoni, G. De Angelis, M. Dispenza, A. Fiorello, Kari Kautio, Manu Lahdes, R. Marcelli, Kari Rönkä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    The technology for the realisation of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations.
    Original languageEnglish
    Title of host publicationProceedings of the 3rd European Microwave Integrated Circuit Conference, EuMIC 2008
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages366-369
    ISBN (Print)978-2-87487-007-1
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication
    Event3rd European Microwave Integrated Circuit Conference, EuMIC 2008 - Amsterdam, Netherlands
    Duration: 27 Oct 200828 Oct 2008

    Conference

    Conference3rd European Microwave Integrated Circuit Conference, EuMIC 2008
    Abbreviated titleEuMIC 2008
    Country/TerritoryNetherlands
    CityAmsterdam
    Period27/10/0828/10/08

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