Abstract
| Original language | English |
|---|---|
| Publication status | Published - 2007 |
| MoE publication type | Not Eligible |
| Event | XLI Annual Conference of the Finnish Physical Society - Tallin, Estonia Duration: 15 Mar 2007 → 17 Mar 2007 |
Conference
| Conference | XLI Annual Conference of the Finnish Physical Society |
|---|---|
| Country | Estonia |
| City | Tallin |
| Period | 15/03/07 → 17/03/07 |
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Keywords
- aluminum nitride
- bulk acoustic wave resonator
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Aluminum nitride for thin film bulk acoustic wave resonators. / Nurmela, Arto; Riekkinen, Tommi; Pensala, Tuomas; Molarius, Jyrki; Ylilammi, Markku.
2007. Paper presented at XLI Annual Conference of the Finnish Physical Society, Tallin, Estonia.Research output: Contribution to conference › Conference article › Scientific
TY - CONF
T1 - Aluminum nitride for thin film bulk acoustic wave resonators
AU - Nurmela, Arto
AU - Riekkinen, Tommi
AU - Pensala, Tuomas
AU - Molarius, Jyrki
AU - Ylilammi, Markku
N1 - Project code: 3266
PY - 2007
Y1 - 2007
N2 - We have developed a piezo electric aluminum nitride (AlN) deposition process which enables the manufacturing of bulk acoustic wave (BAW) resonators. The BAW devices may be used in numerous GHz frequency applications: Radio frequency filters in new mobile communication technologies eg.3g, umts, cdma and in present technologies like gsm, wlan and mlan, local clocks for computers and ultrawide band filters (UWB) and also for example actuators in micro-electric mechanical systems (MEMS).
AB - We have developed a piezo electric aluminum nitride (AlN) deposition process which enables the manufacturing of bulk acoustic wave (BAW) resonators. The BAW devices may be used in numerous GHz frequency applications: Radio frequency filters in new mobile communication technologies eg.3g, umts, cdma and in present technologies like gsm, wlan and mlan, local clocks for computers and ultrawide band filters (UWB) and also for example actuators in micro-electric mechanical systems (MEMS).
KW - aluminum nitride
KW - bulk acoustic wave resonator
M3 - Conference article
ER -