Aluminum nitride for thin film bulk acoustic wave resonators

Arto Nurmela, Tommi Riekkinen, Tuomas Pensala, Jyrki Molarius, Markku Ylilammi

    Research output: Contribution to conferenceConference articleScientific

    Fingerprint

    Dive into the research topics of 'Aluminum nitride for thin film bulk acoustic wave resonators'. Together they form a unique fingerprint.

    Keyphrases

    INIS

    Engineering

    Material Science