Amorphous layer formation at the TaC/Cu interface in the Si/TaC/Cu metallization system
- Tomi Laurila
- , Zeng Kejun
- , Jorma K. Kivilahti
- , Jyrki Molarius
- , Ilkka Suni
- Helsinki University of Technology
Research output: Contribution to journal › Article › Scientific › peer-review
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(Scopus)