Amorphous layer formation at the TaC/Cu interface in the Si/TaC/Cu metallization system

Tomi Laurila, Zeng Kejun, Jorma K. Kivilahti, Jyrki Molarius, Ilkka Suni

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

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Physics & Astronomy