Amorphous metals for RF-MEMS

Hannu Kattelus, Mari Ylönen, Tauno Vähä-Heikkilä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    Several RF-MEMS devices can benefit from metallic micromachining processes in comparison to the conventional silicon-based MEMS technologies for various reasons. A variety of metallic materials and their fabrication techniques have indeed been tested in the laboratory but commercial volume manufacturing processes for RF-MEMS devices are almost non-existent. Good conductors such as copper and gold do not perform optimally as structural materials during extended cycling. This report describes a new group of materials for RF-MEMS: amorphous metals. In terms of electrical conductivity amorphous metals are intermediate between elemental metals and semiconductors but they can fulfil the mechanical function of the devices despite of their conductivity limitation.
    Original languageEnglish
    Title of host publicationURSI/IEEE XXIX Convention on Radio Science
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    ISBN (Electronic)951-38-6296-8
    ISBN (Print)951-38-6295-X
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication
    EventURSI/IEEE XXIX Convention on Radio Science - Espoo, Finland
    Duration: 1 Nov 20042 Nov 2004

    Publication series

    SeriesVTT Symposium


    ConferenceURSI/IEEE XXIX Convention on Radio Science


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