@inproceedings{13d5d574c1944a8e99e88c19f7fe8e8d,
title = "Amorphous metals for RF-MEMS",
abstract = "Several RF-MEMS devices can benefit from metallic micromachining processes in comparison to the conventional silicon-based MEMS technologies for various reasons. A variety of metallic materials and their fabrication techniques have indeed been tested in the laboratory but commercial volume manufacturing processes for RF-MEMS devices are almost non-existent. Good conductors such as copper and gold do not perform optimally as structural materials during extended cycling. This report describes a new group of materials for RF-MEMS: amorphous metals. In terms of electrical conductivity amorphous metals are intermediate between elemental metals and semiconductors but they can fulfil the mechanical function of the devices despite of their conductivity limitation.",
author = "Hannu Kattelus and Mari Yl{\"o}nen and Tauno V{\"a}h{\"a}-Heikkil{\"a}",
year = "2004",
language = "English",
isbn = "951-38-6295-X",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "235",
pages = "13--13",
booktitle = "URSI/IEEE XXIX Convention on Radio Science",
address = "Finland",
note = "URSI/IEEE XXIX Convention on Radio Science ; Conference date: 01-11-2004 Through 02-11-2004",
}
