@inproceedings{ea4f86799cb7427dad6f96675f92212d,
title = "Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 μm SOI platform",
abstract = "VTT's 3 μm SOI platform with record low propagation loss (0.1 dB/cm for fundamental mode), as well as polarization insensitivity, offers a rich portfolio of efficient passive and active components. With a view to extend the component toolbox by monolithically integrating high-speed plasmonic modulators, we have developed an a-Si:H based waveguide escalator to take out light from highly confined thick-SOI passives to the top layer where active materials are monolithically integrated. Using the compact escalator, monolithic integration of various high-speed active components on the 3 μm SOI platform are proposed.",
keywords = "Active devices, Amorphous silicon, Monolithic integration, MPW run, Silicon photonics, SOI, Thick-SOI waveguides, Waveguide escalator",
author = "Arijit Bera and Matteo Cherchi and Kirsi Tappura and P{\"a}ivi Heimala and Timo Aalto",
year = "2020",
doi = "10.1117/12.2544311",
language = "English",
isbn = "978-1-5106-3333-9",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Reed, {Graham T.} and Knights, {Andrew P.}",
booktitle = "Silicon Photonics XV",
address = "United States",
note = "Silicon Photonics XV 2020 ; Conference date: 03-02-2020 Through 06-02-2020",
}