Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform

Arijit Bera; Matteo Cherchi; Kirsi Tappura; Päivi Heimala; Timo Aalto

doi:10.1117/12.2544311

Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform

Arijit Bera^*
, Matteo Cherchi
, Kirsi Tappura
, Päivi Heimala
, Timo Aalto

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

VTT's 3 µm SOI platform with record low propagation loss (0.1 dB/cm for fundamental mode), as well as polarization insensitivity, offers a rich portfolio of efficient passive and active components. With a view to extend the component toolbox by monolithically integrating high-speed plasmonic modulators, we have developed an a-Si:H based waveguide escalator to take out light from highly confined thick-SOI passives to the top layer where active materials are monolithically integrated. Using the compact escalator, monolithic integration of various high-speed active components on the 3 µm SOI platform are proposed.

Original language	English
Title of host publication	Silicon Photonics XV
Editors	Graham T. Reed, Andrew P. Knights
Publisher	International Society for Optics and Photonics SPIE
ISBN (Print)	978-1-5106-3333-9
DOIs	https://doi.org/10.1117/12.2544311
Publication status	Published - 2020
MoE publication type	A4 Article in a conference publication
Event	Silicon Photonics XV 2020 - San Francisco, United States Duration: 3 Feb 2020 → 6 Feb 2020

Publication series

Series	Proceedings of SPIE
Volume	11285
ISSN	0277-786X

Conference

Conference	Silicon Photonics XV 2020
Country/Territory	United States
City	San Francisco
Period	3/02/20 → 6/02/20

Funding

The works presented here belong to the RAPSI project, funded by Business Finland with the agreement number 992/31/2018. The work is also a part of the Academy of Finland Flagship Program - Photonics Research and Innovation (PREIN), decision number 320168.

Keywords

Active devices
Amorphous silicon
Monolithic integration
MPW run
Silicon photonics
SOI
Thick-SOI waveguides
Waveguide escalator

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10.1117/12.2544311

Cite this

@inproceedings{ea4f86799cb7427dad6f96675f92212d,

title = "Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform",

abstract = "VTT's 3 µm SOI platform with record low propagation loss (0.1 dB/cm for fundamental mode), as well as polarization insensitivity, offers a rich portfolio of efficient passive and active components. With a view to extend the component toolbox by monolithically integrating high-speed plasmonic modulators, we have developed an a-Si:H based waveguide escalator to take out light from highly confined thick-SOI passives to the top layer where active materials are monolithically integrated. Using the compact escalator, monolithic integration of various high-speed active components on the 3 µm SOI platform are proposed.",

keywords = "Active devices, Amorphous silicon, Monolithic integration, MPW run, Silicon photonics, SOI, Thick-SOI waveguides, Waveguide escalator",

author = "Arijit Bera and Matteo Cherchi and Kirsi Tappura and P{\"a}ivi Heimala and Timo Aalto",

year = "2020",

doi = "10.1117/12.2544311",

language = "English",

isbn = "978-1-5106-3333-9",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

editor = "Reed, \{Graham T.\} and Knights, \{Andrew P.\}",

booktitle = "Silicon Photonics XV",

address = "United States",

note = "Silicon Photonics XV 2020 ; Conference date: 03-02-2020 Through 06-02-2020",

}

Bera, A, Cherchi, M, Tappura, K , Heimala, P & Aalto, T 2020, Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform. in GT Reed & AP Knights (eds), Silicon Photonics XV., 1128507, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 11285, Silicon Photonics XV 2020, San Francisco, United States, 3/02/20. https://doi.org/10.1117/12.2544311

Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform. / Bera, Arijit; Cherchi, Matteo; Tappura, Kirsi et al.
Silicon Photonics XV. ed. / Graham T. Reed; Andrew P. Knights. International Society for Optics and Photonics SPIE, 2020. 1128507 (Proceedings of SPIE, Vol. 11285).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Amorphous silicon waveguide escalator

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AU - Bera, Arijit

AU - Cherchi, Matteo

AU - Tappura, Kirsi

AU - Heimala, Päivi

AU - Aalto, Timo

PY - 2020

Y1 - 2020

N2 - VTT's 3 µm SOI platform with record low propagation loss (0.1 dB/cm for fundamental mode), as well as polarization insensitivity, offers a rich portfolio of efficient passive and active components. With a view to extend the component toolbox by monolithically integrating high-speed plasmonic modulators, we have developed an a-Si:H based waveguide escalator to take out light from highly confined thick-SOI passives to the top layer where active materials are monolithically integrated. Using the compact escalator, monolithic integration of various high-speed active components on the 3 µm SOI platform are proposed.

AB - VTT's 3 µm SOI platform with record low propagation loss (0.1 dB/cm for fundamental mode), as well as polarization insensitivity, offers a rich portfolio of efficient passive and active components. With a view to extend the component toolbox by monolithically integrating high-speed plasmonic modulators, we have developed an a-Si:H based waveguide escalator to take out light from highly confined thick-SOI passives to the top layer where active materials are monolithically integrated. Using the compact escalator, monolithic integration of various high-speed active components on the 3 µm SOI platform are proposed.

KW - Active devices

KW - Amorphous silicon

KW - Monolithic integration

KW - MPW run

KW - Silicon photonics

KW - SOI

KW - Thick-SOI waveguides

KW - Waveguide escalator

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DO - 10.1117/12.2544311

M3 - Conference article in proceedings

AN - SCOPUS:85082675993

SN - 978-1-5106-3333-9

T3 - Proceedings of SPIE

BT - Silicon Photonics XV

A2 - Reed, Graham T.

A2 - Knights, Andrew P.

PB - International Society for Optics and Photonics SPIE

Y2 - 3 February 2020 through 6 February 2020

ER -

Amorphous silicon waveguide escalator: Monolithic integration of active components on 3 µm SOI platform

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Keywords

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