Amorphous Ta-Si-N thin-film alloys as diffusion barriers in AI/Si metallizations

Elzbieta Kolawa, Jyrki Molarius, C.W. Nieh, Marc Nicolet

Research output: Contribution to journalArticleScientificpeer-review

76 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Amorphous Ta-Si-N thin-film alloys as diffusion barriers in AI/Si metallizations'. Together they form a unique fingerprint.

INIS

Keyphrases

Material Science