An analog RF MEMS slotline true-time-delay phase shifter

K. Van Caekenberghe, Tauno Vähä-Heikkilä

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)

Abstract

An analog RF microelectromechanical systems (MEMS) slotline true-time-delay (TTD) phase shifter is presented for use in conjunction with tapered slot antennas, such as the Vivaldi aerial and the double exponentially tapered slot antenna. The design is a scalable distributed loaded-line cascade of 62 novel differential slow-wave unit cells. Each differential slow-wave unit cell comprises an electrically short slotline section, which is loaded with a shunt impedance consisting of two center-pulled contactless fixed-fixed beam RF MEMS varactors in series, sharing a common electrode. The analog RF MEMS slotline TTD phase shifter is demonstrated on a borosilicate glass wafer using a microfabrication process requiring six masks. It is designed for transistor-transistor logic bias voltage levels and exhibits a measured phase shift of 28.2deg/dB (7.8 ps/dB) and 59.2deg/cm at 10 GHz, maintaining a 75-Omega differential impedance match (S11dd < -15.8 dB). The input third-order intercept point is 5 dBm at 10 GHz for a Deltaf of 50 kHz, measured in a 100-Omega differential transmission line system. Design and fabrication opportunities, concerning distortion and loss reduction, as well as packaging, are highlighted.
Original languageEnglish
Pages (from-to)2151-2159
Number of pages9
JournalIEEE Transactions on Microwave Theory and Techniques
Volume56
Issue number9
DOIs
Publication statusPublished - 2008
MoE publication typeA1 Journal article-refereed

Fingerprint

Phase shifters
microelectromechanical systems
MEMS
Time delay
slot antennas
Slot antennas
time lag
analogs
Transistors
transistor logic
impedance
varactor diodes
Varactors
Borosilicate glass
Microfabrication
shunts
borosilicate glass
Bias voltage
cells
Phase shift

Keywords

  • electronically scanned array
  • phase shifter
  • RF microelectromechanical systems (MEMS)
  • MEMS
  • slotline
  • true time delay (TTD)

Cite this

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title = "An analog RF MEMS slotline true-time-delay phase shifter",
abstract = "An analog RF microelectromechanical systems (MEMS) slotline true-time-delay (TTD) phase shifter is presented for use in conjunction with tapered slot antennas, such as the Vivaldi aerial and the double exponentially tapered slot antenna. The design is a scalable distributed loaded-line cascade of 62 novel differential slow-wave unit cells. Each differential slow-wave unit cell comprises an electrically short slotline section, which is loaded with a shunt impedance consisting of two center-pulled contactless fixed-fixed beam RF MEMS varactors in series, sharing a common electrode. The analog RF MEMS slotline TTD phase shifter is demonstrated on a borosilicate glass wafer using a microfabrication process requiring six masks. It is designed for transistor-transistor logic bias voltage levels and exhibits a measured phase shift of 28.2deg/dB (7.8 ps/dB) and 59.2deg/cm at 10 GHz, maintaining a 75-Omega differential impedance match (S11dd < -15.8 dB). The input third-order intercept point is 5 dBm at 10 GHz for a Deltaf of 50 kHz, measured in a 100-Omega differential transmission line system. Design and fabrication opportunities, concerning distortion and loss reduction, as well as packaging, are highlighted.",
keywords = "electronically scanned array, phase shifter, RF microelectromechanical systems (MEMS), MEMS, slotline, true time delay (TTD)",
author = "{Van Caekenberghe}, K. and Tauno V{\"a}h{\"a}-Heikkil{\"a}",
year = "2008",
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An analog RF MEMS slotline true-time-delay phase shifter. / Van Caekenberghe, K.; Vähä-Heikkilä, Tauno.

In: IEEE Transactions on Microwave Theory and Techniques, Vol. 56, No. 9, 2008, p. 2151-2159.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

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AB - An analog RF microelectromechanical systems (MEMS) slotline true-time-delay (TTD) phase shifter is presented for use in conjunction with tapered slot antennas, such as the Vivaldi aerial and the double exponentially tapered slot antenna. The design is a scalable distributed loaded-line cascade of 62 novel differential slow-wave unit cells. Each differential slow-wave unit cell comprises an electrically short slotline section, which is loaded with a shunt impedance consisting of two center-pulled contactless fixed-fixed beam RF MEMS varactors in series, sharing a common electrode. The analog RF MEMS slotline TTD phase shifter is demonstrated on a borosilicate glass wafer using a microfabrication process requiring six masks. It is designed for transistor-transistor logic bias voltage levels and exhibits a measured phase shift of 28.2deg/dB (7.8 ps/dB) and 59.2deg/cm at 10 GHz, maintaining a 75-Omega differential impedance match (S11dd < -15.8 dB). The input third-order intercept point is 5 dBm at 10 GHz for a Deltaf of 50 kHz, measured in a 100-Omega differential transmission line system. Design and fabrication opportunities, concerning distortion and loss reduction, as well as packaging, are highlighted.

KW - electronically scanned array

KW - phase shifter

KW - RF microelectromechanical systems (MEMS)

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KW - slotline

KW - true time delay (TTD)

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