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An intercomparison of phase shifts in interferometric gauge block calibration

  • Mikael Frennberg
  • , Reine Johansson
  • , Jes Henningsen
  • , Steen-Ulrik Ipsen
  • , Bitten Poulsen
  • , Helge Karlsson
  • , Heikki Lehto
  • RISE Research Institutes of Sweden
  • Danish National Metrology Institute (DFM)
  • Norwegian Metrology Service
  • VTT (former employee or external)

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A comparison of phase correction measurements by the stack method and by roughness measurements has been performed by the National Metrology Institutes of Sweden, Denmark, Norway and Finland. For a given technique the agreement between the participants is good, but the roughness measurements give consistently lower results for the phase correction than the stack method. This may be due to a systematic error in the stack results, originating from form errors.
Original languageEnglish
Title of host publicationRecent Developments in Optical Gauge Block Metrology
EditorsJennifer E. Decker, Nicholas Brown
PublisherInternational Society for Optics and Photonics SPIE
Pages247-251
ISBN (Print)978-0-8194-2932-2
DOIs
Publication statusPublished - 1998
MoE publication typeA4 Article in a conference publication
EventSPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, United States
Duration: 16 Jul 199824 Jul 1998

Publication series

SeriesProceedings of SPIE
Volume3477
ISSN0277-786X

Conference

ConferenceSPIE's International Symposium on Optical Science, Engineering, and Instrumentation
Country/TerritoryUnited States
CitySan Diego
Period16/07/9824/07/98

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