An RF integrated spiral inductor model

Anssi Leppänen, Markku Åberg (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    This work describes the modelling of a planar integrated inductor on silicon. In this case modelling means that we try to build a subcircuit model for circuit design purposes. The goal of the model is that all its elements could be derived from process parameters and layout geometrics rather than measured performance.
    This model has been programmed to operate as a defined model component of the APLAC circuit simulator, and it is optimized for integrated inductors having non-tapered, squared and full turns.
    Matching of the developed model with measured results is very good a wide range of inductance, but the model needs still four parameters to be determined empirically from process test structures.
    Original languageEnglish
    Pages (from-to)216-217
    JournalPhysica Scripta
    Volume2002
    Issue numberT101
    DOIs
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed
    Event19th Nordic Semiconductor Meeting, NSM19
    - Copenhagen, Denmark
    Duration: 20 May 200123 May 2001

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