TY - GEN
T1 - An Ultrasonically Powered System Using an AlN PMUT Receiver for Delivering Instantaneous mW-Range DC Power to Biomedical Implants
AU - Rashidi, Amin
AU - Saccher, Marta
AU - Karuthedath, Cyril
AU - Abhilash, Thanninyil Sebastian
AU - Stuart Savoia, Alessandro
AU - Lavigne, Frederik
AU - Stubbe, Frederic
AU - Dekker, Ronald
AU - Giagka, Vasiliki
PY - 2023/11
Y1 - 2023/11
N2 - Aluminum Nitride (AlN) Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are gaining interest for biomedical implant power due to biocompatibility and low-temperature processing. However, due to the low piezoelectric coefficient of AlN PMUTs, storage capacitors are often used to accumulate ultrasonic power transferred over an extended time. The accumulated energy is then used to power a DC load, which leads to a long start-up time, and insufficient duty cycle for some applications. We present an ultrasonically powered system for biomedical implants capable of delivering mW-range instantaneous power to DC loads, without pre-storing it. The system features a 25 mm 2 AlN PMUT, an inductive matching network, and an application-specific power management integrated circuit(ASIC). For an acoustic intensity of 360 mW/cm 2 at the surface of the PMUT, an open-circuit voltage of 1.11 V and an aperture efficiency of 30.5 % are measured. Furthermore, by connecting a series-matching inductor to the PMUT, the highest-reported power delivered to the load (PDL) of 6.4 mW is measured over an optimal load of 7.6 Ω. Finally, together with the ASIC and at the intensity of 108 mW/cm 2 , our system delivers 1.04 mW DC power to a 3.3 kΩ load, which is over two orders of magnitude higher than the previously reported average DC power for AlN PMUTs.
AB - Aluminum Nitride (AlN) Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are gaining interest for biomedical implant power due to biocompatibility and low-temperature processing. However, due to the low piezoelectric coefficient of AlN PMUTs, storage capacitors are often used to accumulate ultrasonic power transferred over an extended time. The accumulated energy is then used to power a DC load, which leads to a long start-up time, and insufficient duty cycle for some applications. We present an ultrasonically powered system for biomedical implants capable of delivering mW-range instantaneous power to DC loads, without pre-storing it. The system features a 25 mm 2 AlN PMUT, an inductive matching network, and an application-specific power management integrated circuit(ASIC). For an acoustic intensity of 360 mW/cm 2 at the surface of the PMUT, an open-circuit voltage of 1.11 V and an aperture efficiency of 30.5 % are measured. Furthermore, by connecting a series-matching inductor to the PMUT, the highest-reported power delivered to the load (PDL) of 6.4 mW is measured over an optimal load of 7.6 Ω. Finally, together with the ASIC and at the intensity of 108 mW/cm 2 , our system delivers 1.04 mW DC power to a 3.3 kΩ load, which is over two orders of magnitude higher than the previously reported average DC power for AlN PMUTs.
KW - AlN PMUT
KW - implants
KW - matching network
KW - power management
KW - ultrasonic powering
UR - http://www.scopus.com/inward/record.url?scp=85178644351&partnerID=8YFLogxK
U2 - 10.1109/IUS51837.2023.10306557
DO - 10.1109/IUS51837.2023.10306557
M3 - Conference article in proceedings
SN - 979-8-3503-4646-6
T3 - IEEE International Ultrasonics Symposium (IUS)
BT - 2023 IEEE International Ultrasonics Symposium (IUS)
PB - IEEE Institute of Electrical and Electronic Engineers
T2 - 2023 IEEE International Ultrasonics Symposium (IUS)
Y2 - 3 September 2023 through 8 September 2023
ER -