Analysis of a MEMS transmission line

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Abstract

A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.
Original languageEnglish
Pages (from-to)1977-1981
Number of pages5
JournalIEEE Transactions on Microwave Theory and Techniques
Volume51
Issue number8
DOIs
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Fingerprint

transmission lines
microelectromechanical systems
MEMS
Electric lines
acoustics
Waveguides
Acoustic waves
Acoustic wave propagation
Acoustic impedance
waveguides
Resonators
Transducers
electrical impedance
Acoustics
wave propagation
Silicon
transducers
rods
Geometry
resonators

Keywords

  • electromechanical coupling
  • microelectromechanical systems
  • MEMS devices
  • MEMS
  • RF MEMS
  • transmission line
  • waveguide

Cite this

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title = "Analysis of a MEMS transmission line",
abstract = "A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.",
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Analysis of a MEMS transmission line. / Alastalo, A.T.; Mattila, T.; Seppä, H.

In: IEEE Transactions on Microwave Theory and Techniques, Vol. 51, No. 8, 2003, p. 1977-1981.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Analysis of a MEMS transmission line

AU - Alastalo, A.T.

AU - Mattila, T.

AU - Seppä, H.

N1 - Cited By :7 Export Date: 16 May 2018

PY - 2003

Y1 - 2003

N2 - A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.

AB - A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.

KW - electromechanical coupling

KW - microelectromechanical systems

KW - MEMS devices

KW - MEMS

KW - RF MEMS

KW - transmission line

KW - waveguide

U2 - 10.1109/TMTT.2003.815270

DO - 10.1109/TMTT.2003.815270

M3 - Article

VL - 51

SP - 1977

EP - 1981

JO - IEEE Transactions on Microwave Theory and Techniques

JF - IEEE Transactions on Microwave Theory and Techniques

SN - 0018-9480

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