Analysis of a MEMS transmission line

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    11 Citations (Scopus)

    Abstract

    A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.
    Original languageEnglish
    Pages (from-to)1977-1981
    Number of pages5
    JournalIEEE Transactions on Microwave Theory and Techniques
    Volume51
    Issue number8
    DOIs
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed

    Keywords

    • electromechanical coupling
    • microelectromechanical systems
    • MEMS devices
    • MEMS
    • RF MEMS
    • transmission line
    • waveguide

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