Analysis of a MEMS transmission line

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Abstract

A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.
Original languageEnglish
Pages (from-to)1977-1981
Number of pages5
JournalIEEE Transactions on Microwave Theory and Techniques
Volume51
Issue number8
DOIs
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

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Keywords

  • electromechanical coupling
  • microelectromechanical systems
  • MEMS devices
  • MEMS
  • RF MEMS
  • transmission line
  • waveguide

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