Analysis of a MEMS transmission line

A.T. Alastalo; T. Mattila; H. Seppä

doi:10.1109/TMTT.2003.815270

Analysis of a MEMS transmission line

A.T. Alastalo, T. Mattila, H. Seppä

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

Abstract

A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.

Original language	English
Pages (from-to)	1977-1981
Number of pages	5
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	51
Issue number	8
DOIs	https://doi.org/10.1109/TMTT.2003.815270
Publication status	Published - 2003
MoE publication type	A1 Journal article-refereed

Keywords

electromechanical coupling
microelectromechanical systems
MEMS devices
MEMS
RF MEMS
transmission line
waveguide

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10.1109/TMTT.2003.815270

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0042025081&doi=10.1109%2fTMTT.2003.815270&partnerID=40&md5=3c930d2585203a8146d58b101c562c32

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@article{cc452f5867014495a46c0db73939982c,

title = "Analysis of a MEMS transmission line",

abstract = "A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.",

keywords = "electromechanical coupling, microelectromechanical systems, MEMS devices, MEMS, RF MEMS, transmission line, waveguide",

author = "A.T. Alastalo and T. Mattila and H. Sepp{\"a}",

note = "Cited By :7 Export Date: 16 May 2018",

year = "2003",

doi = "10.1109/TMTT.2003.815270",

language = "English",

volume = "51",

pages = "1977--1981",

journal = "IEEE Transactions on Microwave Theory and Techniques",

issn = "0018-9480",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

number = "8",

}

TY - JOUR

T1 - Analysis of a MEMS transmission line

AU - Alastalo, A.T.

AU - Mattila, T.

AU - Seppä, H.

N1 - Cited By :7 Export Date: 16 May 2018

PY - 2003

Y1 - 2003

N2 - A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.

AB - A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electromechanical impedance, an electrical equivalent model is derived for the acoustic transmission line. A numerical example and a comparison to measured properties of a MEMS-transmission-line resonator shows that the characteristic impedance level of the waveguide is typically high, which causes challenges for matched termination. Solutions to overcome the matching problems are discussed.

KW - electromechanical coupling

KW - microelectromechanical systems

KW - MEMS devices

KW - MEMS

KW - RF MEMS

KW - transmission line

KW - waveguide

U2 - 10.1109/TMTT.2003.815270

DO - 10.1109/TMTT.2003.815270

M3 - Article

SN - 0018-9480

VL - 51

SP - 1977

EP - 1981

JO - IEEE Transactions on Microwave Theory and Techniques

JF - IEEE Transactions on Microwave Theory and Techniques

IS - 8

ER -

Analysis of a MEMS transmission line

Abstract

Keywords

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