Analysis of anchor and interface losses in piezoelectric MEMS resonators

Attilio Frangi; Massimiliano Cremonesi; Antti Jaakkola; Tuomas Pensala

doi:10.1016/j.sna.2012.10.022

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Attilio Frangi (Corresponding Author), Massimiliano Cremonesi, Antti Jaakkola, Tuomas Pensala

Polytechnic University of Milan

Research output: Contribution to journal › Article › Scientific › peer-review

78 Citations (Scopus)

Abstract

This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

Original language	English
Pages (from-to)	127-135
Journal	Sensors and Actuators A: Physical
Volume	190
DOIs	https://doi.org/10.1016/j.sna.2012.10.022
Publication status	Published - 2013
MoE publication type	A1 Journal article-refereed

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10.1016/j.sna.2012.10.022

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@article{d5e1fa4e19124d1f89a1e4ccbc3a3028,

title = "Analysis of anchor and interface losses in piezoelectric MEMS resonators",

abstract = "This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.",

author = "Attilio Frangi and Massimiliano Cremonesi and Antti Jaakkola and Tuomas Pensala",

year = "2013",

doi = "10.1016/j.sna.2012.10.022",

language = "English",

volume = "190",

pages = "127--135",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Analysis of anchor and interface losses in piezoelectric MEMS resonators

AU - Frangi, Attilio

AU - Cremonesi, Massimiliano

AU - Jaakkola, Antti

AU - Pensala, Tuomas

PY - 2013

Y1 - 2013

N2 - This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

AB - This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

U2 - 10.1016/j.sna.2012.10.022

DO - 10.1016/j.sna.2012.10.022

M3 - Article

SN - 0924-4247

VL - 190

SP - 127

EP - 135

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

Analysis of anchor and interface losses in piezoelectric MEMS resonators

Abstract

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