Analysis of anchor and interface losses in piezoelectric MEMS resonators

A. Frangi (Corresponding Author), M. Cremonesi, Antti Jaakkola, Tuomas Pensala

    Research output: Contribution to journalArticleScientificpeer-review

    49 Citations (Scopus)

    Abstract

    This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.
    Original languageEnglish
    Pages (from-to)127-135
    Number of pages9
    JournalSensors and Actuators A: Physical
    Volume190
    DOIs
    Publication statusPublished - 2013
    MoE publication typeA1 Journal article-refereed

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    Anchors
    microelectromechanical systems
    MEMS
    Resonators
    dissipation
    resonators
    proposals
    vibration mode

    Cite this

    Frangi, A. ; Cremonesi, M. ; Jaakkola, Antti ; Pensala, Tuomas. / Analysis of anchor and interface losses in piezoelectric MEMS resonators. In: Sensors and Actuators A: Physical. 2013 ; Vol. 190. pp. 127-135.
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    Analysis of anchor and interface losses in piezoelectric MEMS resonators. / Frangi, A. (Corresponding Author); Cremonesi, M.; Jaakkola, Antti; Pensala, Tuomas.

    In: Sensors and Actuators A: Physical, Vol. 190, 2013, p. 127-135.

    Research output: Contribution to journalArticleScientificpeer-review

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    AU - Cremonesi, M.

    AU - Jaakkola, Antti

    AU - Pensala, Tuomas

    PY - 2013

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    AB - This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

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