Analysis of anchor and interface losses in piezoelectric MEMS resonators

A. Frangi (Corresponding Author), M. Cremonesi, Antti Jaakkola, Tuomas Pensala

Research output: Contribution to journalArticleScientificpeer-review

47 Citations (Scopus)

Abstract

This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.
Original languageEnglish
Pages (from-to)127-135
Number of pages9
JournalSensors and Actuators A: Physical
Volume190
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Fingerprint

Anchors
microelectromechanical systems
MEMS
Resonators
dissipation
resonators
proposals
vibration mode

Cite this

Frangi, A. ; Cremonesi, M. ; Jaakkola, Antti ; Pensala, Tuomas. / Analysis of anchor and interface losses in piezoelectric MEMS resonators. In: Sensors and Actuators A: Physical. 2013 ; Vol. 190. pp. 127-135.
@article{d5e1fa4e19124d1f89a1e4ccbc3a3028,
title = "Analysis of anchor and interface losses in piezoelectric MEMS resonators",
abstract = "This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.",
author = "A. Frangi and M. Cremonesi and Antti Jaakkola and Tuomas Pensala",
year = "2013",
doi = "10.1016/j.sna.2012.10.022",
language = "English",
volume = "190",
pages = "127--135",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

Analysis of anchor and interface losses in piezoelectric MEMS resonators. / Frangi, A. (Corresponding Author); Cremonesi, M.; Jaakkola, Antti; Pensala, Tuomas.

In: Sensors and Actuators A: Physical, Vol. 190, 2013, p. 127-135.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Analysis of anchor and interface losses in piezoelectric MEMS resonators

AU - Frangi, A.

AU - Cremonesi, M.

AU - Jaakkola, Antti

AU - Pensala, Tuomas

PY - 2013

Y1 - 2013

N2 - This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

AB - This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement.

U2 - 10.1016/j.sna.2012.10.022

DO - 10.1016/j.sna.2012.10.022

M3 - Article

VL - 190

SP - 127

EP - 135

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

ER -