Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films

J. Saarilahti, J. Salmi, J. Likonen, E. Rauhala

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.

Original languageEnglish
Pages (from-to)193-197
JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume64
Issue number1-4
DOIs
Publication statusPublished - 2 Feb 1992
MoE publication typeA1 Journal article-refereed

Fingerprint

Thin films
Ions
thin films
ions
Backscattering
Secondary ion mass spectrometry
Ion beams
secondary ion mass spectrometry
homogeneity
Sputtering
backscattering
sputtering
ion beams
Scattering
Crystalline materials
X ray diffraction
Scanning electron microscopy
electrical resistivity
scanning electron microscopy
Oxygen

Cite this

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title = "Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films",
abstract = "Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.",
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Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films. / Saarilahti, J.; Salmi, J.; Likonen, J.; Rauhala, E.

In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 64, No. 1-4, 02.02.1992, p. 193-197.

Research output: Contribution to journalArticleScientificpeer-review

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AB - Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.

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