Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films

J. Saarilahti, J. Salmi, J. Likonen, E. Rauhala

    Research output: Contribution to journalArticleScientificpeer-review

    1 Citation (Scopus)

    Abstract

    Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.

    Original languageEnglish
    Pages (from-to)193-197
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume64
    Issue number1-4
    DOIs
    Publication statusPublished - 2 Feb 1992
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Thin films
    Ions
    thin films
    ions
    Backscattering
    Secondary ion mass spectrometry
    Ion beams
    secondary ion mass spectrometry
    homogeneity
    Sputtering
    backscattering
    sputtering
    ion beams
    Scattering
    Crystalline materials
    X ray diffraction
    Scanning electron microscopy
    electrical resistivity
    scanning electron microscopy
    Oxygen

    Cite this

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    title = "Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films",
    abstract = "Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.",
    author = "J. Saarilahti and J. Salmi and J. Likonen and E. Rauhala",
    year = "1992",
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    Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films. / Saarilahti, J.; Salmi, J.; Likonen, J.; Rauhala, E.

    In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 64, No. 1-4, 02.02.1992, p. 193-197.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films

    AU - Saarilahti, J.

    AU - Salmi, J.

    AU - Likonen, J.

    AU - Rauhala, E.

    PY - 1992/2/2

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    N2 - Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.

    AB - Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.

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