Keyphrases
Annealing
100%
In Situ
100%
Co-sputtering
100%
Film Morphology
50%
Ion Beam Analysis
50%
Characterization Techniques
50%
X Ray Diffraction
50%
Oxygen Content
50%
Phase Detection
50%
Elemental Mapping
50%
He Ions
50%
Crystalline Phase
50%
Backscattering Spectra
50%
Lateral Heterogeneity
50%
Post-annealing
50%
Energy Range
50%
12C Ions
50%
Van Der Pauw Method
50%
Resonant Scattering
50%
Cryocooler
50%
Reactive Co-sputtering
50%
Film Resistance
50%
INIS
annealing
100%
thin films
100%
films
100%
ions
100%
comparative evaluations
33%
data
33%
morphology
33%
scanning electron microscopy
33%
mapping
33%
temperature dependence
33%
oxygen
33%
sputtering
33%
spectra
33%
helium 4
33%
ion beams
33%
x-ray diffraction
33%
MeV range
33%
carbon 12
33%
backscattering
33%
sims
33%
energy range
33%
oxygen 16
33%
resonance scattering
33%
Material Science
Film
100%
Thin Films
100%
Electrical Resistivity
33%
Scanning Electron Microscopy
33%
X-Ray Diffraction
33%
Secondary Ion Mass Spectrometry
33%
Physics
Thin Films
100%
Backscattering
50%
Scanning Electron Microscopy
50%
X Ray Diffraction
50%
Ion Beam
50%