Analysis of depth profiling data obtained by confocal Raman microspectroscopy

J. Vyörykkä (Corresponding Author), Jouko Paaso, Mari Tenhunen, Jussi Tenhunen, H. Iitti, T. Vuorinen, P. Stenius

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

Abstract

The nominal depth resolution achieved in confocal Raman microscopy is on the order of a few micrometers. Often, however, the depth resolution is decreased by light refraction at the sample surface. The problem can be avoided with the use of an immersion objective and index matching oils. Through this intervention the instrument point-spread function (PSF) can be assumed to be independent of the depth of focus in the sample, and spatially invariant depth profiles can be acquired. In this work the instrument PSF was determined by measuring a depth profile of a thick uniform sample and calculating the first derivative of the depth profile curve. The first-derivative method was also used to determine sample thickness. Convolution with the PSF makes it possible to simulate the behavior of the instrument with different sample functions. It is also possible to use the instrument PSF to deconvolve depth-profiling data. Deconvolution reduces the blurring effect of the instrument and increases the depth resolution. Deconvolution can also be used in analysis of the sample surface position and in layer structure analysis. In this paper we show how the convolution integral can be used with the immersion sampling technique to determine the PSF and how the sample thickness can be determined.
Original languageEnglish
Pages (from-to)1123-1128
Number of pages6
JournalApplied Spectroscopy
Volume57
Issue number9
DOIs
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Fingerprint

Depth profiling
Optical transfer function
point spread functions
Deconvolution
Convolution
Light refraction
Derivatives
convolution integrals
submerging
profiles
Microscopic examination
Oils
blurring
Sampling
micrometers
refraction
oils
sampling
microscopy
curves

Keywords

  • Confocal Raman
  • Deconvolution
  • Depth profling
  • Point-spread function

Cite this

Vyörykkä, J., Paaso, J., Tenhunen, M., Tenhunen, J., Iitti, H., Vuorinen, T., & Stenius, P. (2003). Analysis of depth profiling data obtained by confocal Raman microspectroscopy. Applied Spectroscopy, 57(9), 1123-1128. https://doi.org/10.1366/00037020360695982
Vyörykkä, J. ; Paaso, Jouko ; Tenhunen, Mari ; Tenhunen, Jussi ; Iitti, H. ; Vuorinen, T. ; Stenius, P. / Analysis of depth profiling data obtained by confocal Raman microspectroscopy. In: Applied Spectroscopy. 2003 ; Vol. 57, No. 9. pp. 1123-1128.
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Vyörykkä, J, Paaso, J, Tenhunen, M, Tenhunen, J, Iitti, H, Vuorinen, T & Stenius, P 2003, 'Analysis of depth profiling data obtained by confocal Raman microspectroscopy', Applied Spectroscopy, vol. 57, no. 9, pp. 1123-1128. https://doi.org/10.1366/00037020360695982

Analysis of depth profiling data obtained by confocal Raman microspectroscopy. / Vyörykkä, J. (Corresponding Author); Paaso, Jouko; Tenhunen, Mari; Tenhunen, Jussi; Iitti, H.; Vuorinen, T.; Stenius, P.

In: Applied Spectroscopy, Vol. 57, No. 9, 2003, p. 1123-1128.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Analysis of depth profiling data obtained by confocal Raman microspectroscopy

AU - Vyörykkä, J.

AU - Paaso, Jouko

AU - Tenhunen, Mari

AU - Tenhunen, Jussi

AU - Iitti, H.

AU - Vuorinen, T.

AU - Stenius, P.

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AB - The nominal depth resolution achieved in confocal Raman microscopy is on the order of a few micrometers. Often, however, the depth resolution is decreased by light refraction at the sample surface. The problem can be avoided with the use of an immersion objective and index matching oils. Through this intervention the instrument point-spread function (PSF) can be assumed to be independent of the depth of focus in the sample, and spatially invariant depth profiles can be acquired. In this work the instrument PSF was determined by measuring a depth profile of a thick uniform sample and calculating the first derivative of the depth profile curve. The first-derivative method was also used to determine sample thickness. Convolution with the PSF makes it possible to simulate the behavior of the instrument with different sample functions. It is also possible to use the instrument PSF to deconvolve depth-profiling data. Deconvolution reduces the blurring effect of the instrument and increases the depth resolution. Deconvolution can also be used in analysis of the sample surface position and in layer structure analysis. In this paper we show how the convolution integral can be used with the immersion sampling technique to determine the PSF and how the sample thickness can be determined.

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