@inproceedings{b3df77f680da44b984ee81448d6d8418,
title = "Analysis of molybdenum via-hole sidewall residue",
author = "Nina Piril{\"a} and Jari Likonen and S. Newcomb and Unto Tapper and Hannu Kattelus and Simo Er{\"a}nen",
year = "2000",
language = "English",
isbn = "1-566-77254-0",
series = "ECS Proceedings Volumes",
publisher = "Electrochemical Society ECS",
pages = "68--79",
booktitle = "Interconnect and Contact Metallization for ULSI: Proceedings of the International Symposium",
address = "United States",
}