Analysis of molybdenum via-hole sidewall residue

Nina Pirilä, Jari Likonen, S. Newcomb, Unto Tapper, Hannu Kattelus, Simo Eränen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationInterconnect and Contact Metallization for ULSI: Proceedings of the International Symposium
    Subtitle of host publicationHonolulu, US, 17-22 September 1999
    PublisherElectrochemical Society ECS
    ISBN (Print)1-566-77254-0
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Publication series

    SeriesECS Proceedings Volumes

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