Analysis of vibration modes in a micromechanical square-plate resonator

Olli Holmgren (Corresponding Author), Kimmo Kokkonen, Timo Veijola, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jouni K. Knuuttila, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)

Abstract

Vibration modes of a micromechanical square-plate resonator were studied using a scanning laser interferometer. The resonator consists of a square plate released from a silicon substrate and has its main resonance at 13.1 MHz. The resonator is designed to utilize a square-extensional vibration mode in which the vibrations mainly take place in the direction parallel to the surface of the plate. A special detection scheme was used to allow measurement of the in-plane vibrations in addition to the out-of-plane component detected by the interferometer. The measured vibration modes were compared to numerical finite-element simulations with good agreement. In particular, it was found out that the out-of-plane vibration field measured at the resonance frequency of the main mode is a superposition of a parasitic vertical vibration mode and the out-of-plane component of the main mode. Furthermore, the measurements revealed undesirable vibrations in the anchor regions indicating energy leakage from the resonator causing additional losses. The quality factors of the vibration modes were also determined from the laser-probe measurements and they agree quite well with those determined from electrical measurements.
Original languageEnglish
Article number015028
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number1
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

Fingerprint

Resonators
Interferometers
Lasers
Silicon
Laser modes
Anchors
Vibrations (mechanical)
Scanning
Substrates

Cite this

Holmgren, Olli ; Kokkonen, Kimmo ; Veijola, Timo ; Mattila, Tomi ; Kaajakari, Ville ; Oja, Aarne ; Knuuttila, Jouni K. ; Kaivola, Matti. / Analysis of vibration modes in a micromechanical square-plate resonator. In: Journal of Micromechanics and Microengineering. 2009 ; Vol. 19, No. 1.
@article{91e1de9a18a54a6b9d3f02282be3ba91,
title = "Analysis of vibration modes in a micromechanical square-plate resonator",
abstract = "Vibration modes of a micromechanical square-plate resonator were studied using a scanning laser interferometer. The resonator consists of a square plate released from a silicon substrate and has its main resonance at 13.1 MHz. The resonator is designed to utilize a square-extensional vibration mode in which the vibrations mainly take place in the direction parallel to the surface of the plate. A special detection scheme was used to allow measurement of the in-plane vibrations in addition to the out-of-plane component detected by the interferometer. The measured vibration modes were compared to numerical finite-element simulations with good agreement. In particular, it was found out that the out-of-plane vibration field measured at the resonance frequency of the main mode is a superposition of a parasitic vertical vibration mode and the out-of-plane component of the main mode. Furthermore, the measurements revealed undesirable vibrations in the anchor regions indicating energy leakage from the resonator causing additional losses. The quality factors of the vibration modes were also determined from the laser-probe measurements and they agree quite well with those determined from electrical measurements.",
author = "Olli Holmgren and Kimmo Kokkonen and Timo Veijola and Tomi Mattila and Ville Kaajakari and Aarne Oja and Knuuttila, {Jouni K.} and Matti Kaivola",
year = "2009",
doi = "10.1088/0960-1317/19/1/015028",
language = "English",
volume = "19",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics IOP",
number = "1",

}

Holmgren, O, Kokkonen, K, Veijola, T, Mattila, T, Kaajakari, V, Oja, A, Knuuttila, JK & Kaivola, M 2009, 'Analysis of vibration modes in a micromechanical square-plate resonator', Journal of Micromechanics and Microengineering, vol. 19, no. 1, 015028. https://doi.org/10.1088/0960-1317/19/1/015028

Analysis of vibration modes in a micromechanical square-plate resonator. / Holmgren, Olli (Corresponding Author); Kokkonen, Kimmo; Veijola, Timo; Mattila, Tomi; Kaajakari, Ville; Oja, Aarne; Knuuttila, Jouni K.; Kaivola, Matti.

In: Journal of Micromechanics and Microengineering, Vol. 19, No. 1, 015028, 2009.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Analysis of vibration modes in a micromechanical square-plate resonator

AU - Holmgren, Olli

AU - Kokkonen, Kimmo

AU - Veijola, Timo

AU - Mattila, Tomi

AU - Kaajakari, Ville

AU - Oja, Aarne

AU - Knuuttila, Jouni K.

AU - Kaivola, Matti

PY - 2009

Y1 - 2009

N2 - Vibration modes of a micromechanical square-plate resonator were studied using a scanning laser interferometer. The resonator consists of a square plate released from a silicon substrate and has its main resonance at 13.1 MHz. The resonator is designed to utilize a square-extensional vibration mode in which the vibrations mainly take place in the direction parallel to the surface of the plate. A special detection scheme was used to allow measurement of the in-plane vibrations in addition to the out-of-plane component detected by the interferometer. The measured vibration modes were compared to numerical finite-element simulations with good agreement. In particular, it was found out that the out-of-plane vibration field measured at the resonance frequency of the main mode is a superposition of a parasitic vertical vibration mode and the out-of-plane component of the main mode. Furthermore, the measurements revealed undesirable vibrations in the anchor regions indicating energy leakage from the resonator causing additional losses. The quality factors of the vibration modes were also determined from the laser-probe measurements and they agree quite well with those determined from electrical measurements.

AB - Vibration modes of a micromechanical square-plate resonator were studied using a scanning laser interferometer. The resonator consists of a square plate released from a silicon substrate and has its main resonance at 13.1 MHz. The resonator is designed to utilize a square-extensional vibration mode in which the vibrations mainly take place in the direction parallel to the surface of the plate. A special detection scheme was used to allow measurement of the in-plane vibrations in addition to the out-of-plane component detected by the interferometer. The measured vibration modes were compared to numerical finite-element simulations with good agreement. In particular, it was found out that the out-of-plane vibration field measured at the resonance frequency of the main mode is a superposition of a parasitic vertical vibration mode and the out-of-plane component of the main mode. Furthermore, the measurements revealed undesirable vibrations in the anchor regions indicating energy leakage from the resonator causing additional losses. The quality factors of the vibration modes were also determined from the laser-probe measurements and they agree quite well with those determined from electrical measurements.

U2 - 10.1088/0960-1317/19/1/015028

DO - 10.1088/0960-1317/19/1/015028

M3 - Article

VL - 19

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 1

M1 - 015028

ER -