Analysis of vibration modes in a micromechanical square-plate resonator

Olli Holmgren (Corresponding Author), Kimmo Kokkonen, Timo Veijola, Tomi Mattila, Ville Kaajakari, Aarne Oja, Jouni K. Knuuttila, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science