Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm

Pekka Pursula; Jaakko Saarilahti; O. Paul; V. Viikari

Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm

Pekka Pursula, Jaakko Saarilahti, O. Paul, V. Viikari

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.

Original language	English
Title of host publication	Proceedings MME 2012
Place of Publication	Ilmenau, Germany
Publication status	Published - 2012
MoE publication type	A4 Article in a conference publication
Event	23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sep 2012 → 12 Sep 2012

Workshop

Workshop	23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated title	MME 2012
Country	Germany
City	Ilmenau
Period	9/09/12 → 12/09/12

Keywords

MEMS
ultrasonic transducer
non-uniform diaphragm

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Pursula, P., Saarilahti, J., Paul, O., & Viikari, V. (2012). Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. In Proceedings MME 2012 [4 p.]. https://www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_D/D03_1636_MME2012_120628.pdf

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title = "Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm",

abstract = "In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.",

keywords = "MEMS, ultrasonic transducer, non-uniform diaphragm",

author = "Pekka Pursula and Jaakko Saarilahti and O. Paul and V. Viikari",

note = "LIS: OA proceedings ; 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, MME 2012 ; Conference date: 09-09-2012 Through 12-09-2012",

year = "2012",

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Pursula, P , Saarilahti, J, Paul, O & Viikari, V 2012, Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. in Proceedings MME 2012., 4 p., Ilmenau, Germany, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 9/09/12. <https://www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_D/D03_1636_MME2012_120628.pdf>

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AU - Pursula, Pekka

AU - Saarilahti, Jaakko

AU - Paul, O.

AU - Viikari, V.

N1 - LIS: OA proceedings

PY - 2012

Y1 - 2012

N2 - In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.

AB - In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.

KW - MEMS

KW - ultrasonic transducer

KW - non-uniform diaphragm

UR - https://www.tu-ilmenau.de/mme2012/proceedings/

M3 - Conference article in proceedings

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