Abstract
Original language | English |
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Title of host publication | Proceedings MME 2012 |
Place of Publication | Ilmenau, Germany |
Publication status | Published - 2012 |
MoE publication type | A4 Article in a conference publication |
Event | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sep 2012 → 12 Sep 2012 |
Workshop
Workshop | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 |
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Abbreviated title | MME 2012 |
Country | Germany |
City | Ilmenau |
Period | 9/09/12 → 12/09/12 |
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Keywords
- MEMS
- ultrasonic transducer
- non-uniform diaphragm
Cite this
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Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. / Pursula, Pekka; Saarilahti, Jaakko; Paul, O.; Viikari, V.
Proceedings MME 2012. Ilmenau, Germany, 2012. 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm
AU - Pursula, Pekka
AU - Saarilahti, Jaakko
AU - Paul, O.
AU - Viikari, V.
N1 - LIS: OA proceedings
PY - 2012
Y1 - 2012
N2 - In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.
AB - In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.
KW - MEMS
KW - ultrasonic transducer
KW - non-uniform diaphragm
UR - https://www.tu-ilmenau.de/mme2012/proceedings/
M3 - Conference article in proceedings
SN - 978-3-9388-4371-0
BT - Proceedings MME 2012
CY - Ilmenau, Germany
ER -