Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm

Pekka Pursula, Jaakko Saarilahti, O. Paul, V. Viikari

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.
    Original languageEnglish
    Title of host publicationProceedings MME 2012
    Place of PublicationIlmenau, Germany
    Publication statusPublished - 2012
    MoE publication typeA4 Article in a conference publication
    Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
    Duration: 9 Sep 201212 Sep 2012


    Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
    Abbreviated titleMME 2012



    • MEMS
    • ultrasonic transducer
    • non-uniform diaphragm

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