Abstract
In this paper we present for the ?rst time an analytical
electromechanical model for capacitive micromachined
ultrasonic transducers (CMUTs) with multi-layered
diaphragms of non-uniform thickness. The model is based
on dynamical Kirchhoff plate theory, which allows to
derive the accurate static de?ection and vibration mode,
and hence the mechanical and electrical impedance of the
transducer. Experimental veri?cation of the model is
provided by measurements of electrical impedance and
transmission in air. Resonant frequencies given by the
model deviate less than 2 % from the measured results.
| Original language | English |
|---|---|
| Title of host publication | Proceedings MME 2012 |
| Place of Publication | Ilmenau, Germany |
| Publication status | Published - 2012 |
| MoE publication type | A4 Article in a conference publication |
| Event | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany Duration: 9 Sep 2012 → 12 Sep 2012 |
Workshop
| Workshop | 23rd Micromechanics and Microsystems Europe Workshop, MME 2012 |
|---|---|
| Abbreviated title | MME 2012 |
| Country | Germany |
| City | Ilmenau |
| Period | 9/09/12 → 12/09/12 |
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Keywords
- MEMS
- ultrasonic transducer
- non-uniform diaphragm
Cite this
Pursula, P., Saarilahti, J., Paul, O., & Viikari, V. (2012). Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. In Proceedings MME 2012 [4 p.].