Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm

Pekka Pursula, Jaakko Saarilahti, O. Paul, V. Viikari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.
Original languageEnglish
Title of host publicationProceedings MME 2012
Place of PublicationIlmenau, Germany
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
Duration: 9 Sep 201212 Sep 2012

Workshop

Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
Abbreviated titleMME 2012
CountryGermany
CityIlmenau
Period9/09/1212/09/12

Fingerprint

diaphragms
transducers
ultrasonics
electrical impedance
mechanical impedance
plate theory
resonant frequencies
vibration mode
cations
air

Keywords

  • MEMS
  • ultrasonic transducer
  • non-uniform diaphragm

Cite this

Pursula, P., Saarilahti, J., Paul, O., & Viikari, V. (2012). Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. In Proceedings MME 2012 [4 p.] Ilmenau, Germany.
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abstract = "In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 {\%} from the measured results.",
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Pursula, P, Saarilahti, J, Paul, O & Viikari, V 2012, Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. in Proceedings MME 2012., 4 p., Ilmenau, Germany, 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 9/09/12.

Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. / Pursula, Pekka; Saarilahti, Jaakko; Paul, O.; Viikari, V.

Proceedings MME 2012. Ilmenau, Germany, 2012. 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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N2 - In this paper we present for the ?rst time an analytical electromechanical model for capacitive micromachined ultrasonic transducers (CMUTs) with multi-layered diaphragms of non-uniform thickness. The model is based on dynamical Kirchhoff plate theory, which allows to derive the accurate static de?ection and vibration mode, and hence the mechanical and electrical impedance of the transducer. Experimental veri?cation of the model is provided by measurements of electrical impedance and transmission in air. Resonant frequencies given by the model deviate less than 2 % from the measured results.

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Pursula P, Saarilahti J, Paul O, Viikari V. Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm. In Proceedings MME 2012. Ilmenau, Germany. 2012. 4 p.