Annealing behaviour of aluminium-implanted InP

Vesa Kyllönen (Corresponding Author), J. Räisänen, Tiina Seppälä, T. Ahlgren, Jari Likonen

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

The annealing behaviour of aluminium has been studied in single-crystal InP implanted with 40 and 120 keV 27Al+ ions. The implantation doses were 1 x 1015 and 1 x 1016 cm-2. The aluminium concentration profiles were determined by two techniques, Secondary ion mass spectrometry (SIMS) and the nuclear resonance broadening technique (NRB) which was used for checking purposes. The usability of the SIMS technique for profiling Al rich layers was studied. Significant inconsistencies were observed in the SIMS profiles with the high dose implanted samples. The 120 keV, 1 x 1016 cm-2 implanted samples were subject to annealing in argon atmosphere in the temperature range 380–600°C. Redistribution and a significant aluminium surface enrichment took place. The coefficients of Al migration were determined by fitting a concentration independent solution of the diffusion equation to the experimental depth profiles. The deduced activation energy and frequency factor for aluminium migration in implanted InP are 0.78 eV and 5.5 x 105 nm2 / s, respectively. The effect of defects on the Al migration is discussed. Rutherford backscattering (RBS) spectra measured along ‹100› channeling direction for 120 keV, 1016 cm−2 implanted samples indicated a loss of crystalline structure near the surface both in the as-implanted and in the annealed samples.
Original languageEnglish
Pages (from-to)673 - 676
Number of pages4
JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume161-163
DOIs
Publication statusPublished - 2000
MoE publication typeA1 Journal article-refereed

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Secondary ion mass spectrometry
Annealing
secondary ion mass spectrometry
aluminum
Aluminum
annealing
profiles
dosage
Rutherford backscattering spectroscopy
Ion implantation
Argon
implantation
backscattering
Activation energy
argon
Single crystals
activation energy
Crystalline materials
atmospheres
Defects

Cite this

Kyllönen, Vesa ; Räisänen, J. ; Seppälä, Tiina ; Ahlgren, T. ; Likonen, Jari. / Annealing behaviour of aluminium-implanted InP. In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 2000 ; Vol. 161-163. pp. 673 - 676.
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title = "Annealing behaviour of aluminium-implanted InP",
abstract = "The annealing behaviour of aluminium has been studied in single-crystal InP implanted with 40 and 120 keV 27Al+ ions. The implantation doses were 1 x 1015 and 1 x 1016 cm-2. The aluminium concentration profiles were determined by two techniques, Secondary ion mass spectrometry (SIMS) and the nuclear resonance broadening technique (NRB) which was used for checking purposes. The usability of the SIMS technique for profiling Al rich layers was studied. Significant inconsistencies were observed in the SIMS profiles with the high dose implanted samples. The 120 keV, 1 x 1016 cm-2 implanted samples were subject to annealing in argon atmosphere in the temperature range 380–600°C. Redistribution and a significant aluminium surface enrichment took place. The coefficients of Al migration were determined by fitting a concentration independent solution of the diffusion equation to the experimental depth profiles. The deduced activation energy and frequency factor for aluminium migration in implanted InP are 0.78 eV and 5.5 x 105 nm2 / s, respectively. The effect of defects on the Al migration is discussed. Rutherford backscattering (RBS) spectra measured along ‹100› channeling direction for 120 keV, 1016 cm−2 implanted samples indicated a loss of crystalline structure near the surface both in the as-implanted and in the annealed samples.",
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Annealing behaviour of aluminium-implanted InP. / Kyllönen, Vesa (Corresponding Author); Räisänen, J.; Seppälä, Tiina; Ahlgren, T.; Likonen, Jari.

In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 161-163, 2000, p. 673 - 676.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Annealing behaviour of aluminium-implanted InP

AU - Kyllönen, Vesa

AU - Räisänen, J.

AU - Seppälä, Tiina

AU - Ahlgren, T.

AU - Likonen, Jari

N1 - Project code: KET1434

PY - 2000

Y1 - 2000

N2 - The annealing behaviour of aluminium has been studied in single-crystal InP implanted with 40 and 120 keV 27Al+ ions. The implantation doses were 1 x 1015 and 1 x 1016 cm-2. The aluminium concentration profiles were determined by two techniques, Secondary ion mass spectrometry (SIMS) and the nuclear resonance broadening technique (NRB) which was used for checking purposes. The usability of the SIMS technique for profiling Al rich layers was studied. Significant inconsistencies were observed in the SIMS profiles with the high dose implanted samples. The 120 keV, 1 x 1016 cm-2 implanted samples were subject to annealing in argon atmosphere in the temperature range 380–600°C. Redistribution and a significant aluminium surface enrichment took place. The coefficients of Al migration were determined by fitting a concentration independent solution of the diffusion equation to the experimental depth profiles. The deduced activation energy and frequency factor for aluminium migration in implanted InP are 0.78 eV and 5.5 x 105 nm2 / s, respectively. The effect of defects on the Al migration is discussed. Rutherford backscattering (RBS) spectra measured along ‹100› channeling direction for 120 keV, 1016 cm−2 implanted samples indicated a loss of crystalline structure near the surface both in the as-implanted and in the annealed samples.

AB - The annealing behaviour of aluminium has been studied in single-crystal InP implanted with 40 and 120 keV 27Al+ ions. The implantation doses were 1 x 1015 and 1 x 1016 cm-2. The aluminium concentration profiles were determined by two techniques, Secondary ion mass spectrometry (SIMS) and the nuclear resonance broadening technique (NRB) which was used for checking purposes. The usability of the SIMS technique for profiling Al rich layers was studied. Significant inconsistencies were observed in the SIMS profiles with the high dose implanted samples. The 120 keV, 1 x 1016 cm-2 implanted samples were subject to annealing in argon atmosphere in the temperature range 380–600°C. Redistribution and a significant aluminium surface enrichment took place. The coefficients of Al migration were determined by fitting a concentration independent solution of the diffusion equation to the experimental depth profiles. The deduced activation energy and frequency factor for aluminium migration in implanted InP are 0.78 eV and 5.5 x 105 nm2 / s, respectively. The effect of defects on the Al migration is discussed. Rutherford backscattering (RBS) spectra measured along ‹100› channeling direction for 120 keV, 1016 cm−2 implanted samples indicated a loss of crystalline structure near the surface both in the as-implanted and in the annealed samples.

U2 - 10.1016/S0168-583X(99)00756-9

DO - 10.1016/S0168-583X(99)00756-9

M3 - Article

VL - 161-163

SP - 673

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JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

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