Annealing behaviour of aluminium-implanted InP

Vesa Kyllönen (Corresponding Author), J. Räisänen, Tiina Seppälä, T. Ahlgren, Jari Likonen

    Research output: Contribution to journal › Article › Scientific › peer-review

    3 Citations (Scopus)

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    Keyphrases

    INIS

    Engineering

    Chemistry

    Material Science