Annealing behaviour of high-dose-implanted nitrogen in InP

Jari Likonen, K. Väkeväinen, T. Ahlgren, Jyrki Räisänen, Esko Rauhala, J. Keinonen

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)

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    Engineering & Materials Science