Abstract
Concerns on food safety, and need for high quality and
extended shelf-life of packaged foods have promoted the
development of antibacterial barrier packaging materials.
Few articles have been available dealing with the barrier
or antimicrobial properties of zinc oxide thin films
deposited at low temperature with atomic layer deposition
(ALD) onto commercial polymer films typically used for
packaging purposes. The purpose of this paper was to
study the properties of ZnO thin films compared to those
of aluminum oxide. It was also possible to deposit ZnO
thin films onto oriented polylactic acid and
polypropylene films at relatively low temperatures using
ozone instead of water as an oxidizing precursor for
diethylzinc. Replacing water with ozone changed both the
structure and the chemical composition of films deposited
on silicon wafers. ZnO films deposited with ozone
contained large grains covered and separated probably by
a more amorphous and uniform layer. These thin films were
also assumed to contain zinc salts of carboxylic acids.
The barrier properties of a 25 nm ZnO thin film deposited
with ozone at 100 °C were quite close to those obtained
earlier with ALD Al2O3 of similar apparent thickness on
similar polymer films. ZnO thin films deposited at low
temperature indicated migration of antibacterial agent,
while direct contact between ZnO and Al2O3 thin films and
bacteria promoted antibacterial activity
Original language | English |
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Pages (from-to) | 331 - 337 |
Journal | Thin Solid Films |
Volume | 562 |
Issue number | July |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Keywords
- Aluminum oxide
- antibacterial
- atomic layer deposition
- barrier
- growth
- zinc oxide