Abstract
Original language | English |
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Pages (from-to) | 331 - 337 |
Journal | Thin Solid Films |
Volume | 562 |
Issue number | July |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
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Keywords
- Aluminum oxide
- antibacterial
- atomic layer deposition
- barrier
- growth
- zinc oxide
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Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures. / Vähä-Nissi, Mika (Corresponding Author); Pitkänen, Marja; Salo, Erkki; Kenttä, Eija; Tanskanen, A (Corresponding Author); Sajavaara, T (Corresponding Author); Putkonen, Matti; Sievänen, Jenni; Sneck, Asko; Rättö, Marjaana; Karppinen, M; Harlin, Ali.
In: Thin Solid Films, Vol. 562, No. July, 2014, p. 331 - 337.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures
AU - Vähä-Nissi, Mika
AU - Pitkänen, Marja
AU - Salo, Erkki
AU - Kenttä, Eija
AU - Tanskanen, A
AU - Sajavaara, T
AU - Putkonen, Matti
AU - Sievänen, Jenni
AU - Sneck, Asko
AU - Rättö, Marjaana
AU - Karppinen, M
AU - Harlin, Ali
PY - 2014
Y1 - 2014
N2 - Concerns on food safety, and need for high quality and extended shelf-life of packaged foods have promoted the development of antibacterial barrier packaging materials. Few articles have been available dealing with the barrier or antimicrobial properties of zinc oxide thin films deposited at low temperature with atomic layer deposition (ALD) onto commercial polymer films typically used for packaging purposes. The purpose of this paper was to study the properties of ZnO thin films compared to those of aluminum oxide. It was also possible to deposit ZnO thin films onto oriented polylactic acid and polypropylene films at relatively low temperatures using ozone instead of water as an oxidizing precursor for diethylzinc. Replacing water with ozone changed both the structure and the chemical composition of films deposited on silicon wafers. ZnO films deposited with ozone contained large grains covered and separated probably by a more amorphous and uniform layer. These thin films were also assumed to contain zinc salts of carboxylic acids. The barrier properties of a 25 nm ZnO thin film deposited with ozone at 100 °C were quite close to those obtained earlier with ALD Al2O3 of similar apparent thickness on similar polymer films. ZnO thin films deposited at low temperature indicated migration of antibacterial agent, while direct contact between ZnO and Al2O3 thin films and bacteria promoted antibacterial activity
AB - Concerns on food safety, and need for high quality and extended shelf-life of packaged foods have promoted the development of antibacterial barrier packaging materials. Few articles have been available dealing with the barrier or antimicrobial properties of zinc oxide thin films deposited at low temperature with atomic layer deposition (ALD) onto commercial polymer films typically used for packaging purposes. The purpose of this paper was to study the properties of ZnO thin films compared to those of aluminum oxide. It was also possible to deposit ZnO thin films onto oriented polylactic acid and polypropylene films at relatively low temperatures using ozone instead of water as an oxidizing precursor for diethylzinc. Replacing water with ozone changed both the structure and the chemical composition of films deposited on silicon wafers. ZnO films deposited with ozone contained large grains covered and separated probably by a more amorphous and uniform layer. These thin films were also assumed to contain zinc salts of carboxylic acids. The barrier properties of a 25 nm ZnO thin film deposited with ozone at 100 °C were quite close to those obtained earlier with ALD Al2O3 of similar apparent thickness on similar polymer films. ZnO thin films deposited at low temperature indicated migration of antibacterial agent, while direct contact between ZnO and Al2O3 thin films and bacteria promoted antibacterial activity
KW - Aluminum oxide
KW - antibacterial
KW - atomic layer deposition
KW - barrier
KW - growth
KW - zinc oxide
U2 - 10.1016/j.tsf.2014.03.068
DO - 10.1016/j.tsf.2014.03.068
M3 - Article
VL - 562
SP - 331
EP - 337
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - July
ER -