Abstract
A sensor (1) comprises a transducer (2), a base plate (3) comprising a space (4) for accommodating the transducer (2), and a silicon-on-insulator plate (5) on top of the base plate (3). The base plate (3) forms a frame for the transducer (2) and the silicon-on-insulator plate (5) at least partly defines a horizontally and vertically extending cavity (6) arranged in connection with the transducer (2). The sensor (1) further comprises a top element (7) on top of the silicon-on-insulator plate (5) for terminating the cavity (6).
Patent family as of 17.12.2021
EP3545294 A1 20191002 EP20170811345 20171123
FI127836 B 20190329 FI20160005894 20161124
FI20165894 A 20180525 FI20160005894 20161124
FI20165894 L 20180525 FI20160005894 20161124
US2019346409 AA 20191114 US20170461521 20171123
WO18096216 A1 20180531 WO2017FI50816 20171123
Patent family as of 17.12.2021
EP3545294 A1 20191002 EP20170811345 20171123
FI127836 B 20190329 FI20160005894 20161124
FI20165894 A 20180525 FI20160005894 20161124
FI20165894 L 20180525 FI20160005894 20161124
US2019346409 AA 20191114 US20170461521 20171123
WO18096216 A1 20180531 WO2017FI50816 20171123
Link to current patent family on right
| Translated title of the contribution | Sensor |
|---|---|
| Original language | Undefined |
| Patent number | FI20165894 |
| IPC | G01N 29/ 22 A I |
| Priority date | 24/11/16 |
| Publication status | Published - 25 May 2018 |
| MoE publication type | H1 Granted patent |