Translated title of the contribution: Sensor

Panu Koppinen (Inventor)

    Research output: PatentPatent


    A sensor (1) comprises a transducer (2), a base plate (3) comprising a space (4) for accommodating the transducer (2), and a silicon-on-insulator plate (5) on top of the base plate (3). The base plate (3) forms a frame for the transducer (2) and the silicon-on-insulator plate (5) at least partly defines a horizontally and vertically extending cavity (6) arranged in connection with the transducer (2). The sensor (1) further comprises a top element (7) on top of the silicon-on-insulator plate (5) for terminating the cavity (6).

    Patent family as of 17.12.2021
    EP3545294 A1 20191002 EP20170811345 20171123      
    FI127836 B 20190329 FI20160005894 20161124      
    FI20165894 A 20180525 FI20160005894 20161124      
    FI20165894 L 20180525 FI20160005894 20161124      
    US2019346409 AA 20191114 US20170461521 20171123      
    WO18096216 A1 20180531 WO2017FI50816 20171123

    Link to current patent family on right 

    Translated title of the contributionSensor
    Original languageUndefined
    Patent numberFI20165894
    IPCG01N 29/ 22 A I
    Priority date24/11/16
    Publication statusPublished - 25 May 2018
    MoE publication typeH1 Granted patent


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