Panu Koppinen (Inventor)

    Research output: PatentPatent


    A sensor (1) comprises a transducer (2), a base plate (3) comprising a space (4) for accommodating the transducer (2), and a silicon-on-insulator plate (5) on top of the base plate (3). The base plate (3) forms a frame for the transducer (2) and the silicon-on-insulator plate (5) at least partly defines a horizontally and vertically extending cavity (6) arranged in connection with the transducer (2). The sensor (1) further comprises a top element (7) on top of the silicon-on-insulator plate (5) for terminating the cavity (6).

    Patent family as of 17.12.2021
    EP3545294 A1 20191002 EP20170811345 20171123      
    FI127836 B 20190329 FI20160005894 20161124      
    FI20165894 A 20180525 FI20160005894 20161124      
    FI20165894 L 20180525 FI20160005894 20161124      
    US2019346409 AA 20191114 US20170461521 20171123      
    WO18096216 A1 20180531 WO2017FI50816 20171123

    Link to current patent family on right 

    Original languageEnglish
    Patent numberFI20165894
    IPCG01N 29/ 22 A I
    Priority date24/11/16
    Publication statusPublished - 25 May 2018
    MoE publication typeH1 Granted patent


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