Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

A.B.M. Jansman, R.C. Strijbos, J.W. Lobeek, F,W.M. Vanhelmont, J.J.M. Ruigrok, Tuomas Pensala, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Ultrasonics Symposium, 2007
Pages1045-1048
DOIs
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium, 2007 - New York, NY, United States
Duration: 28 Oct 200731 Oct 2007

Conference

ConferenceIEEE Ultrasonics Symposium, 2007
CountryUnited States
CityNew York, NY
Period28/10/0731/10/07

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