Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

A.B.M. Jansman; R.C. Strijbos; J.W. Lobeek; F,W.M. Vanhelmont; J.J.M. Ruigrok; Tuomas Pensala; Markku Ylilammi

doi:10.1109/ULTSYM.2007.264

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

A.B.M. Jansman, R.C. Strijbos, J.W. Lobeek, F,W.M. Vanhelmont, J.J.M. Ruigrok, Tuomas Pensala, Markku Ylilammi

NXP Semiconductors Netherlands B.V.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	IEEE Ultrasonics Symposium, 2007
Pages	1045-1048
DOIs	https://doi.org/10.1109/ULTSYM.2007.264
Publication status	Published - 2007
MoE publication type	A4 Article in a conference publication
Event	IEEE Ultrasonics Symposium, 2007 - New York, NY, United States Duration: 28 Oct 2007 → 31 Oct 2007

Conference

Conference	IEEE Ultrasonics Symposium, 2007
Country/Territory	United States
City	New York, NY
Period	28/10/07 → 31/10/07

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10.1109/ULTSYM.2007.264

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title = "Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators",

abstract = "For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.",

author = "A.B.M. Jansman and R.C. Strijbos and J.W. Lobeek and F,W.M. Vanhelmont and J.J.M. Ruigrok and Tuomas Pensala and Markku Ylilammi",

year = "2007",

doi = "10.1109/ULTSYM.2007.264",

language = "English",

isbn = "978-1-4244-1384-3",

pages = "1045--1048",

booktitle = "Proceedings",

note = "IEEE Ultrasonics Symposium, 2007 ; Conference date: 28-10-2007 Through 31-10-2007",

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T1 - Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

AU - Jansman, A.B.M.

AU - Strijbos, R.C.

AU - Lobeek, J.W.

AU - Vanhelmont, F,W.M.

AU - Ruigrok, J.J.M.

AU - Pensala, Tuomas

AU - Ylilammi, Markku

PY - 2007

Y1 - 2007

N2 - For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.

AB - For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.

U2 - 10.1109/ULTSYM.2007.264

DO - 10.1109/ULTSYM.2007.264

M3 - Conference article in proceedings

SN - 978-1-4244-1384-3

SN - 978-1-4244-1383-6

SP - 1045

EP - 1048

BT - Proceedings

T2 - IEEE Ultrasonics Symposium, 2007

Y2 - 28 October 2007 through 31 October 2007

ER -

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

Abstract

Conference

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