Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

A.B.M. Jansman, R.C. Strijbos, J.W. Lobeek, F,W.M. Vanhelmont, J.J.M. Ruigrok, Tuomas Pensala, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)


    For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE Ultrasonics Symposium, 2007
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium, 2007 - New York, NY, United States
    Duration: 28 Oct 200731 Oct 2007


    ConferenceIEEE Ultrasonics Symposium, 2007
    Country/TerritoryUnited States
    CityNew York, NY


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