Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

A.B.M. Jansman, R.C. Strijbos, J.W. Lobeek, F,W.M. Vanhelmont, J.J.M. Ruigrok, Tuomas Pensala, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)


For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Ultrasonics Symposium, 2007
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
EventIEEE Ultrasonics Symposium, 2007 - New York, NY, United States
Duration: 28 Oct 200731 Oct 2007


ConferenceIEEE Ultrasonics Symposium, 2007
CountryUnited States
CityNew York, NY

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