Application of multiple coatings to protect polyimide-based X-ray windows from eroding oxygen attack

Risto Mutikainen

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

The polyimide-based X-ray windows are evaluated with respect to oxygen-induced erosion with an oxygen plasma asher. The use of the atomic oxygen beam was unsuccessful because of particle contamination problems. Various window types were compared with leak tests and microscopic analyses, which were correlated to the structural and fabricational information. The leak test was found to be a very sensitive method in through-the-membrane pinhole detection. The classic membrane structure was found inadequate at withstanding the oxygen erosion exposures. The multiple layer structure with spacer-polyimides between the multiple coatings was found to give excellent protection by restricting the erosion crater depths.
Original languageEnglish
Pages (from-to)259-267
Number of pages9
JournalThin Solid Films
Volume239
Issue number2
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

Fingerprint

polyimides
Polyimides
attack
erosion
Oxygen
coatings
Erosion
X rays
Coatings
oxygen
membrane structures
x rays
oxygen plasma
pinholes
craters
spacers
Membrane structures
contamination
membranes
Contamination

Cite this

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title = "Application of multiple coatings to protect polyimide-based X-ray windows from eroding oxygen attack",
abstract = "The polyimide-based X-ray windows are evaluated with respect to oxygen-induced erosion with an oxygen plasma asher. The use of the atomic oxygen beam was unsuccessful because of particle contamination problems. Various window types were compared with leak tests and microscopic analyses, which were correlated to the structural and fabricational information. The leak test was found to be a very sensitive method in through-the-membrane pinhole detection. The classic membrane structure was found inadequate at withstanding the oxygen erosion exposures. The multiple layer structure with spacer-polyimides between the multiple coatings was found to give excellent protection by restricting the erosion crater depths.",
author = "Risto Mutikainen",
note = "Project code: puo2012",
year = "1994",
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language = "English",
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journal = "Thin Solid Films",
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}

Application of multiple coatings to protect polyimide-based X-ray windows from eroding oxygen attack. / Mutikainen, Risto.

In: Thin Solid Films, Vol. 239, No. 2, 1994, p. 259-267.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Application of multiple coatings to protect polyimide-based X-ray windows from eroding oxygen attack

AU - Mutikainen, Risto

N1 - Project code: puo2012

PY - 1994

Y1 - 1994

N2 - The polyimide-based X-ray windows are evaluated with respect to oxygen-induced erosion with an oxygen plasma asher. The use of the atomic oxygen beam was unsuccessful because of particle contamination problems. Various window types were compared with leak tests and microscopic analyses, which were correlated to the structural and fabricational information. The leak test was found to be a very sensitive method in through-the-membrane pinhole detection. The classic membrane structure was found inadequate at withstanding the oxygen erosion exposures. The multiple layer structure with spacer-polyimides between the multiple coatings was found to give excellent protection by restricting the erosion crater depths.

AB - The polyimide-based X-ray windows are evaluated with respect to oxygen-induced erosion with an oxygen plasma asher. The use of the atomic oxygen beam was unsuccessful because of particle contamination problems. Various window types were compared with leak tests and microscopic analyses, which were correlated to the structural and fabricational information. The leak test was found to be a very sensitive method in through-the-membrane pinhole detection. The classic membrane structure was found inadequate at withstanding the oxygen erosion exposures. The multiple layer structure with spacer-polyimides between the multiple coatings was found to give excellent protection by restricting the erosion crater depths.

U2 - 10.1016/0040-6090(94)90861-3

DO - 10.1016/0040-6090(94)90861-3

M3 - Article

VL - 239

SP - 259

EP - 267

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 2

ER -