Applications des MEMS à la métrologie électrique

Translated title of the contribution: Microelectromechanical components in electrical metrology

Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, A. Oja, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientific


    Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.
    Translated title of the contributionMicroelectromechanical components in electrical metrology
    Original languageFrench
    Title of host publicationTechniques de l'Ingénieur, traité Mesures et Controle
    Number of pages12
    Publication statusPublished - 2007
    MoE publication typeB2 Part of a book or another research book


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