Applications des MEMS à la métrologie électrique

Antti Manninen; Anu Kärkkäinen; Nadine Pesonen; A. Oja; Heikki Seppä

Applications des MEMS à la métrologie électrique

Translated title of the contribution: Microelectromechanical components in electrical metrology

Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, A. Oja, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific

Abstract

Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.

Translated title of the contribution	Microelectromechanical components in electrical metrology
Original language	French
Title of host publication	Techniques de l'Ingénieur, traité Mesures et Controle
Number of pages	12
Volume	RE2
Publication status	Published - 2007
MoE publication type	B2 Part of a book or another research book

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Manninen, A., Kärkkäinen, A., Pesonen, N., Oja, A., & Seppä, H. (2007). Applications des MEMS à la métrologie électrique. In Techniques de l'Ingénieur, traité Mesures et Controle (Vol. RE2). Article R 1002 https://www.techniques-ingenieur.fr/base-documentaire/mesures-analyses-th1/grandeurs-electriques-a-mesurer-42417210/applications-des-mems-a-la-metrologie-electrique-r1002/

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abstract = "Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.",

author = "Antti Manninen and Anu K{\"a}rkk{\"a}inen and Nadine Pesonen and A. Oja and Heikki Sepp{\"a}",

year = "2007",

language = "French",

volume = "RE2",

booktitle = "Techniques de l'Ing{\'e}nieur, trait{\'e} Mesures et Controle",

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Manninen, A , Kärkkäinen, A, Pesonen, N, Oja, A & Seppä, H 2007, Applications des MEMS à la métrologie électrique. in Techniques de l'Ingénieur, traité Mesures et Controle. vol. RE2, R 1002. <https://www.techniques-ingenieur.fr/base-documentaire/mesures-analyses-th1/grandeurs-electriques-a-mesurer-42417210/applications-des-mems-a-la-metrologie-electrique-r1002/>

TY - CHAP

T1 - Applications des MEMS à la métrologie électrique

AU - Manninen, Antti

AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Oja, A.

AU - Seppä, Heikki

PY - 2007

Y1 - 2007

N2 - Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.

AB - Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.

UR - https://arxiv.org/abs/0707.0637

M3 - Chapter or book article

VL - RE2

BT - Techniques de l'Ingénieur, traité Mesures et Controle

ER -

Applications des MEMS à la métrologie électrique

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